Subject

Subjects : Deposition temperature

  • Articles (8)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2024 Wide process temperature of atomic layer deposition for In2 O3 thin-film transistors using novel indium precursor (N,N′-di-tert butylacetimidamido)dimethyllindium   Juhun Lee  Nanotechnology, v.35, no.37, pp.1-9 1 원문
Journal 2024 Characteristics of Ultrathin Indium Oxide Thin‐Film Transistors with Diverse Channel Lengths Fabricated by Atomic Layer Deposition   Juhun Lee  Physica Status Solidi (B): Basic Research, v.261, no.7, pp.1-6 2 원문
Journal 2013 High Roughness Ag Back Reflector on a Metal Underlayer for Thin Film Solar Cell Applications   Lee Yoo Jeong  Materials Research Bulletin, v.48, no.12, pp.5093-5098 3 원문
Journal 2011 Impact of amorphous titanium oxide film on the device stability of Al/TiO2/Al resistive memory   정후영  Applied Physics A : Materials Science & Processing, v.102, no.4, pp.967-972 30 원문
Journal 2009 Low Temperature Grown Polycrystalline La0.7Sr0.3MnO3 thin Films on Amorphous SiO2 Substrates by Rf Magnetron Sputtering   최선규  Journal of Vacuum Science and Technology A, v.27, no.4, pp.595-600 3 원문
Journal 2008 Thin-film Passivation by Atomic Layer Deposition for Organic Field-effect Transistors   전하영  Applied Physics Letters, v.93, no.16, pp.1-3 32 원문
Journal 2005 Low-Temperature Growth of SiO2 Films by Plasma-Enhanced Atomic Layer Deposition   Lim Jungwook  ETRI Journal, v.27, no.1, pp.118-121 68 원문
Journal 2001 Fabrication of interface-controlled Josephson junctions using Sr/sub 2/AlTaO/sub 6/ insulating layers   Gun Yong Sung  IEEE Transactions on Applied Superconductivity, v.11, no.1, pp.151-I54 2 원문
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