Subject

Subjects : surface micromachining

  • Articles (11)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2017 Low Power Consumption Solid Electrochemical-Type Micro CO2 Gas Sensor   Jaewoo Lee  Sensors and Actuators B : Chemical, v.248, pp.957-960 41 원문
Journal 2013 Low Power Consumption Micro C2H5OH Gas Sensor Based on Micro-Heater and Screen Printing Technique   Moon Seungeon  Sensors and Actuators B : Chemical, v.187, pp.598-603 25 원문
Conference 2013 Low Power Consumption Micro C2H5OH Gas Sensor based on Micro-heater and Ink Jetting Technique   Moon Seungeon  International Conference on Surfaces, Coatings and Nanostructured Materials (NanoSMat) 2013, pp.68-68
Journal 2012 Low-Power-Consumption Metal Oxide NO2 Gas Sensor based on Micro-Heater and Screen Printing Technology   Moon Seungeon  Journal of Nanoscience and Nanotechnology, v.12, no.7, pp.5543-5546 9 원문
Conference 2008 Surface-Micromachined Deep Back Chamber MEMS Acoustic Sensor Using Two Sacrificial Layers   Jaewoo Lee  SENSORS 2008, pp.569-572 5 원문
Conference 2008 Deformation Reduction of a MEMS Sensor by Stress Balancing of Multilayer   Yang Woo Seok  International Conference on Sensor Technologies and Applications (SENSORCOMM) 2008, pp.391-395 4 원문
Journal 2008 Surface-micromachined MEMS acoustic sensor with bottom electrode anchors   Jaewoo Lee  Electronics Letters, v.44, no.9, pp.1-2 2 원문
Journal 2005 Floating-patch MEMS Antennas on HRS Substrate for Millimetre-wave Applications   조용희  Electronics Letters, v.41, no.1, pp.5-6 0 원문
Journal 2004 Surface micromachined thermally driven micropump   Jang Won Ick  Sensors and Actuators A : Physical, v.115, no.1, pp.151-158 21 원문
Journal 2004 Electrothermally Actuated Fabry–PÉrot Tunable Filter With a High Tuning Efficiency   Kim Chang-Kyu  IEEE Photonics Technology Letters, v.16, no.8, pp.1894-1896 20 원문
Conference 2003 A self-aligned vertical comb-drive actuator using surface micromachining for scanning micromirrors   Dooyoung Hah  IEEE LEOS International Conference on Optical MEMS 2003, pp.151-152 9 원문
특허 검색결과
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