Subjects : Mechanical polishing

Articles (9)
Patents (0)
R&D Reports (0)

논문 검색결과
Type	Year	Title	Cited	Download
Journal	2024	Effect of the Post-Annealing Temperature on the Interfacial Reaction Between a High Tc Superconductor and Topological Insulator Lee Woo Jung Advanced Electronic Materials, v.10, no.7, pp.1-9	4
Journal	2021	In situ implementation of silicon epitaxial layer on amorphous SiO2 using reduced-pressure chemical vapor deposition Kim Sang Hoon Applied Materials Today, v.24, pp.1-7	8
Journal	2013	Micromachined stress-free TSV hole for AlGaN/GaN-on-Si (1 1 1) platform-based devices Sang Choon Ko Journal of Micromechanics and Microengineering, v.23, no.3, pp.1-7	3
Journal	2011	Sub-30 nm Gate Template Fabrication for Nanoimprint Lithography Using Spacer Patterning Technology Park Kun Sik Journal of Nanoscience and Nanotechnology, v.11, no.2, pp.1625-1628	5
Conference	2009	Sub-30 nm Gate Template Fabrications for Nanoimprint Lithography using Spacer Patterning Technology Park Kun Sik International Conference on Nano Science and Nano Technologya (ICNSN) 2009, pp.1-4
Journal	2006	Micromachined Air-Gap Structure MEMS Acoustic Sensor using Reproducible High-Speed Lateral Etching and CMP Process Sang Choon Ko Journal of Micromechanics and Microengineering, v.16, no.10, pp.2071-2076	15
Journal	2005	Strain Relaxed SiGe Buffer Prepared by Means of Thermally Driven Relaxation and CMP Kim Sang Hoon Electrochemical and Solid-State Letters, v.8, no.11, pp.G304-G306	5
Journal	1998	High-Quality Conformal Silicon Oxide Films Prepared by Multi-Step Sputtering PECVD and Chemical Mechanical Polishing Min Park Journal of Electronic Materials, v.27, no.11, pp.1262-1267	9
Journal	1996	Planarised Interconnection Technology using a New Pillar Formation Method with Multi-Stacked Metal Structure Min Park Electronics Letters, v.32, no.18, pp.1731-1732	4

특허 검색결과
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