Subject

Subjects : Sensing electrode

  • Articles (8)
  • Patents (3)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2025 Biocompatible Multilayered Encapsulation for Organic LightEmitting Diodes   Sukyung Choi  ACS Applied Materials & Interfaces, v.17, no.17, pp.25534-25545 3 원문
Journal 2013 Semiconductor-Type MEMS Gas Sensor for Real-Time Environmental Monitoring Applications   Moon Seungeon  ETRI Journal, v.35, no.4, pp.617-624 56 원문
Conference 2010 Z-axis Capacitive MEMS Accelerometer with Moving Ground Masses   Chang Han Je  SENSORS 2010, pp.635-638 2 원문
Journal 2010 Low Power Consumption and High Sensitive NO2 Micro Gas Sensor based on Co-planar Micro-heater fabricated by using CMOS-MEMS Process   Moon Seungeon  Journal of the Korean Physical Society, v.56, no.1, pp.434-438 12 원문
Journal 2009 Fabrication of morphological defect-free vertical electrodes using a (1 1 0) silicon-on-patterned-insulator process for micromachined capacitive inclinometers   윤성식  Journal of Micromechanics and Microengineering, v.19, no.3, pp.1-7 21 원문
Conference 2008 Sensitivity Tunable Capacitive Type Micro Accelerometer   Chang Han Je  SENSORS 2008, pp.1020-1023 4 원문
Conference 2008 Capacitive Micro Inclinometer with Scalloping-Free and Footing-Free Vertical Electrodes using Crystalline Etching of (110) Silicon   윤성식  SENSORS 2008, pp.662-665 0 원문
Journal 2008 The Highly Sensitive NO2 Gas Sensor Using ZnO Nanorods Grown by the Sol-gel Method   Park So Jeong  센서학회지, v.17, no.2, pp.147-150 원문
특허 검색결과
Status Year Patent Name Country Family Pat. KIPRIS
Registered 2009 High sensitivity MEMS capacitive accelerometer using stopper system UNITED STATES
Registered 2012 MICROELECTROMECHANICAL SYSTEMS TYPE SEMICONDUCTOR GAS SENSOR USING MICROHEATER HAVING MANY HOLES AND METHOD FOR MANUFACTURING THE SAME UNITED STATES
Registered 2008 MICRO GAS SENSOR AND MANUFACTURING METHOD THEREOF UNITED STATES
연구보고서 검색결과
Type Year Research Project Primary Investigator Download
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