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Schottky Barrier Diode(SBD) Algan/Gan Heterostructure Normally-Off Gan Heterostructures Algan/Gan-On-Si Semiconductor Device Recent Progress Low-Rate Forward Current Dry Etching Recess Depth Electrical Characteristics Channel Width Silicon Substrate Gan-Based Etching Conditions Surface Passivation Thermal Properties Gan Power Device High Power Conversion Efficiency Iii-Nitrides Low Turn-On Voltage Trade-Off Structural Changes Current Collapse Reverse Leakage Current 4h-Sic High Power Applications 5 Nm Pfc Converter Cvd Diamond Rf Power Forward And Reverse Thermal Behavior Device Structure Defect Analysis Turn-On Threshold Voltage MOS-HEMT Etch-Stop Mass Spectrometry Analysis N-Type Power Density Algan/Gan Mis-Hemt Activation Ratio Dopant Activation Built-In Voltage Bipolar Junction Transistor 700 V Field Metal Fine Control Gate Fabrication Gate Leakage Gan On Sic Initialization Vector(IV) Pin Diode Recessed Gate Sic Surface Annealing Process Built-In Potential 900 V Etching Process Electronic Materials Etching Rate High Temperature Characterization High Breakdown Voltage High Voltage Applications Inductively-Coupled Plasma(ICP) Metal Ring Off-State Leakage Power Semiconductor Single Crystal Thermal Oxidation Diamond Substrate Secondary Ion Mass Spectrometry Gan Hemt I-V Measurement Low Specific On-Resistance Low Damage Peak Electric Field Reverse Recovery Charge Schottky Barrier Height Al Film Al Doping Al Layer Al Concentration Current Status Thermally Annealing Technology Cad Etch Rates Gate Bias Gan-On-Diamond Gan Device High Efficiency Low Contact Resistance Power Transistor Anode Structure Current Density Device Size Diamond Heat Spreader Various Conditions Fin-Gate Chemical Vapor Deposition P-Doping Voltage Shift Efficiency And Power Gate Recess High Electron Mobility Transistor(HEMT) Novel Device Stop Layer Doping Profile Doping Method Blocking Voltage Technology Trends 16 Nm Enhancement-Mode Low-Temperature Annealing Lift-Off Process X-Ray Topography Multi-Step On-Current P-Type Gan Ring Structure Smooth Morphology