Subject

Subjects : Etching conditions

  • Articles (12)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Conference 2025 Fabrication of PPLNOI waveguides via in-situ poling monitoring and optimized dry etching conditions for efficient frequency conversion   Tetiana Slusar  Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC) 2025, pp.1-1 0 원문
Conference 2025 Fabrication of PPLNOI waveguides via in-situ poling monitoring and optimized dry etching conditions for efficient frequency conversion   Hong-Seok Kim  Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC) 2025, pp.1-1 0 원문
Journal 2024 Fabrication of low-loss symmetrical rib waveguides based on x-cut lithium niobate on insulator for integrated quantum photonics   Hong-Seok Kim  ETRI Journal, v.46, no.5, pp.783-792 3 원문
Journal 2023 Analysis of issues in gate recess etching in the InAlAs/InGaAs HEMT manufacturing process   Min Byoung-Gue  ETRI Journal, v.45, no.1, pp.171-179 5 원문
Journal 2020 Effects of Recess Depth Under the Gate Area on the V th-Shift for Fabricating Normally-Off Field Effect Transistors on AlGaN/GaN Heterostructures   Kim Zin-Sig  Journal of Nanoscience and Nanotechnology, v.20, no.7, pp.4170-4175 원문
Conference 2019 Normally-off Field Effect Transistors using fine controlled Recess under Gate Area on AlGaN/GaN Heterostructures   Kim Zin-Sig  대한전자공학회 학술 대회 (추계) 2019, pp.215-218
Journal 2018 Ultra-low Rate Dry Etching Conditions for Fabricating Normally-off Field Effect Transistors on AlGaN/GaN Heterostructures   Kim Zin-Sig  Solid-State Electronics, v.140, pp.12-17 9 원문
Conference 2017 Normally-off AlGaN/GaN Field Effect Transistors with Recessed Gate using Ultra-low Rate Dry Etching Conditions   Kim Zin-Sig  한국 반도체 학술 대회 (KCS) 2017, pp.1-1
Conference 2016 Backside Process of AlGaN/GaN HEMT on SiC with Optimized Via-Hole Etching Conditions   Min Byoung-Gue  International Symposium on the Physics of Semiconductors and Applications (ISPSA) 2016, pp.1-1
Conference 2016 Ultra-low Rate Dry Etching Conditions for Fabrication of Normally-off Field Effect Transistor on AlGaN/GaN Heterostructure   Kim Zin-Sig  International Symposium on the Physics of Semiconductors and Applications (ISPSA) 2016, pp.1-1
Journal 2015 Fabrication and Electrical Properties of an AlGaN/GaN HEMT on SiC with a Taper-Shaped Backside Via Hole   Min Byoung-Gue  Journal of the Korean Physical Society, v.67, no.4, pp.718-722 2 원문
Journal 2002 Characterization of Via Etching in CHF3/CF4 Magnetically Enhanced Reactive Ion Etching Using Neural Networks   Kwon Sung-Ku  ETRI Journal, v.24, no.3, pp.211-220 10 원문
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