Subject

Subjects : Magnetron sputter deposition

  • Articles (11)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2010 Effect of Rf-Power Density on the Resistivity of Ga-Doped ZnO Film Deposited by Rf-Magnetron Sputter Deposition Technique   Jun Kwan Kim  Current Applied Physics, v.10, no.3 SUPPL., pp.S451-S454 35 원문
Journal 2010 High-Performance Transparent Conducting Ga-Doped ZnO Films Deposited by RF Magnetron Sputter Deposition   Jun Kwan Kim  Japanese Journal of Applied Physics, v.49, no.4 PART 2, pp.1-4 17 원문
Conference 2009 Electrical Properties and Thermal Stability of Ga-doped ZnO Thin Film Deposited by RF-Magnetron Sputter Deposition Technique   Jun Kwan Kim  International Photovoltaic Science and Engineering Conference (PVSEC) 2009, pp.1-1
Conference 2009 High Performance Transparent Conducting Ga-Doped ZnO film Deposited by RF-Magnetron Sputter Deposition Technique   Jun Kwan Kim  International Conference on Solid State Devices and Materials (SSDM) 2009, pp.1-2
Journal 2009 Vanadium Dioxide and Vanadium Sesquioxide Thin Films Fabricated on (0001) or (10 10)Al2O3 by Reactive RF-Magnetron Sputter Deposition and Subsequent Annealing Processes   Sun Jin Yun  Japanese Journal of Applied Physics, v.48, no.4, pp.1-4 9 원문
Journal 2009 Fabrication of P-Type ZnO Thin Films Using Rf-Magnetron Sputter Deposition   Jun Kwan Kim  Electrochemical and Solid-State Letters, v.12, no.4, pp.H109-H112 15 원문
Conference 2008 Red-shift of the Photoluminescence Peak of N-doped ZnO Phosphors   Jun Kwan Kim  International Meeting on Information Display (IMID) 2008, pp.895-897
Conference 2008 VO2 and V2O3 Films Fabricated on (1000) or (1010)Al2O3 by Reactive RF-Magnetron Sputter Deposition and Annealing Processes   Sun Jin Yun  International Conference on Solid State Devices and Materials (SSDM) 2008, pp.1-2
Journal 2008 Vanadium Dioxide Films Deposited on Amorphous SiO2- and Al2O3-Coated Si Substrates by Reactive RF-Magnetron Sputter Deposition   Sun Jin Yun  Japanese Journal of Applied Physics, v.47, no.4, pp.3067-3069 22 원문
Journal 2008 Characteristics of Vanadium Dioxide Films Deposited by RF-magnetron Sputter Deposition Technique using V-metal Target   Sun Jin Yun  Physica B : Condensed Matter, v.403, no.5-9, pp.1381-1383 20 원문
Conference 2007 Vanadium Dioxide Films Deposited on SiO2- and Al2O3-coated Si Substrates Using Reactive RF-Magnetron Sputter Deposition Technique   Sun Jin Yun  International Conference on Solid State Devices and Materials (SSDM) 2007, pp.564-565
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