HEMT 라이브러리, 94GHz 대역 스위치, 멀티 레이어 모듈용 전송 선로, 위상 어레이 안테나
KSP Keywords
image sensor
Funding Org.
정보통신부
Research Org.
한국전자통신연구원
Project Code
06MB3800, Components/System for Millimeterwave Passive Image Sensor,
Lee Kyung Ho
Abstract
본 연구에서는 밀리미터파 수동 이미지 감지용 부품/시스템을 개발하는데 필요한 (1) 94 ㎓ 대역 핵심 소자 및 50 ㎚급 InP HEMT 라이브러리 개발, (2) 94 ㎓ 대역 스위치소자 개발, (3) 94 ㎓ 대역 multi-layer 모듈용 전송선로 개발, (4) 94 ㎓ 대역용 phased array 안테나 구조 및 이미지 시스템 설계를 수행하였다. 가. 94 ㎓ 대역 핵심 소자 및 50 ㎚급 InP HEMT 라이브러리 개발 - 주파수 특성 향상을 위한 에피 및 소자구조 최적화 - EBDW에 의한 50 ㎚ 게이트 형성 단위공정 개발 - 94 ㎓ 대역 저잡음 HEMT 소자 개발 - 50 ㎚ InP HEMT 라이브러리 개발 나. 94 ㎓ 대역 스위치 소자 개발 - 94 ㎓ 대역 스위치 소자용 에피 및 소자구조 최적화 - 94 ㎓ 대역 스위치 소자 개발 다. 94 ㎓ 대역 multi-layer 모듈용 전송선로 개발 - Multi-layer 기판 개발 - 94 ㎓ 대역용 저손실 전송선로 및 interconnection 공정 개발 라. 94 ㎓ 대역용 phased array 안테나 구조 및 이미지 시스템 설계 - Radiating element 구조 및 배열 설계 - 2-D phased array radiometer 구조 설계
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