Subject

Subjects : Electron beam lithography

  • Articles (14)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2026 New insights into I-line stepper based InGaAs/InP double-heterojunction bipolar transistors (DHBTs)   Jinchul Cho  Materials Science in Semiconductor Processing, v.201, pp.1-7 0 원문
Journal 2026 New insights into I-line stepper based InGaAs/InP double-heterojunction bipolar transistors (DHBTs)   Kang Soo Cheol  Materials Science in Semiconductor Processing, v.201, pp.1-7 0 원문
Journal 2023 Analysis of issues in gate recess etching in the InAlAs/InGaAs HEMT manufacturing process   Min Byoung-Gue  ETRI Journal, v.45, no.1, pp.171-179 5 원문
Journal 2014 A 10 × 10 Gb/s DFB Laser Diode Array Fabricated Using a SAG Technique   Kwon Oh Kee  Optics Express, v.22, no.8, pp.9073-9080 22 원문
Conference 2014 Characteristics of AlGaN/GaN HEMTs on SiC with Pt-based Schottky Contacts   Hyung Sup Yoon  한국 반도체 학술 대회 (KCS) 2014, pp.1-1
Journal 2013 Nanoscale Biomemory Composed of Recombinant Azurin on a Nanogap Electrode   정용호  Nanotechnology, v.24, no.36, pp.1-8 10 원문
Journal 2011 Design and Fabrication of Label-Free Biochip Using a Guided Mode Resonance Filter with Nano Grating Structures by Injection Molding Process   E. Cho  Journal of Nanoscience and Nanotechnology, v.11, no.1, pp.417-421 9 원문
Conference 2009 Sub-30 nm Gate Template Fabrications for Nanoimprint Lithography using Spacer Patterning Technology   Park Kun Sik  International Conference on Nano Science and Nano Technologya (ICNSN) 2009, pp.1-4
Journal 2009 Fabrication and NO2 Sensing Characteristics of an In2O3 Nanowire Gas Sensor   Moon Seungeon  Journal of the Korean Physical Society, v.54, no.2, pp.830-834
Journal 2008 Electrical Characterization of ZnO Single Nanowire Device for Chemical Sensor Application   Kim Eunkyoung  Journal of Nanoscience and Nanotechnology, v.8, no.9, pp.4698-4701 8 원문
Journal 2007 Fabrication and Atmospheric-Pressure-Dependent Electrical Properties of a ZnO Nanowire Device   Kim Eunkyoung  Journal of the Korean Physical Society, v.51, pp.S170-S173 15
Conference 2006 Atmosphere Pressure Dependent Electrical Properties of the ZnO Nanowire Transistors   Kim Eunkyoung  Nanotechnology Materials and Devices Conference (NMDC) 2006, pp.1-2
Journal 2006 Self-Alignment of Self-Assembled InAs Quantum Dots   홍성의  Journal of Crystal Growth, v.286, no.1, pp.18-22 4 원문
Journal 2004 Focusing grating coupler for blue laser light   Sohn Yeung-Joon  IEEE Photonics Technology Letters, v.16, no.1, pp.162-164 7 원문
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