Subject

Subjects : Capacitive-type

  • Articles (19)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Conference 2018 ZnO Nanowire-based Capacitive Humidity Sensor Integrated on a Polyimide Layer with a Micro-heater   Jaewoo Lee  International Conference and Exhibition for Nanotechnology (NANOPIA) 2018, pp.1-1
Conference 2018 Equivalent Circuit-based Open-circuit Sensitivity Modelling of a Capacitive-type MEMS Acoustic Sensor on Wafer Level   Jaewoo Lee  Eurosensors 2018, pp.1-4
Journal 2017 Design of Cell-Patterns for Large-Sized Window Unified Touch Screen Panels with High Sensitivity   Lee Chang Ho  Journal of Nanoscience and Nanotechnology, v.17, no.11, pp.7865-7868 0 원문
Conference 2017 Stress-Controlled PECVD Si3N4 Diaphragm-based Capacitive-Type Acoustic Sensor for IoT Application   Jaewoo Lee  한국센서학회 종합 학술 대회 2017, pp.145-146
Journal 2016 TiN/PECVD-Si3N4/TiN Diaphragm-based Capacitive-type MEMS Acoustic Sensor   Jaewoo Lee  Electronics Letters, v.52, no.6, pp.468-470 6 원문
Conference 2015 Open-Circuit Sensitivity Model based on Empirical Parameters for a Capacitive-type MEMS Acoustic Sensor   Jaewoo Lee  International Conference on Materials and Applications for Sensors and Transducers (IC-MAST) 2015, pp.1-10 2 원문
Conference 2015 A Capacitive-Type MEMS Acoustic Sensor with a Diaphragm of Al/Si3N4/Al Based on a Polyimide Sacrificial Layer   Jaewoo Lee  International Conference on Electronics, Information and Communication (ICEIC) 2015, pp.228-229
Conference 2013 A Bottom-Inlet type MEMS Acoustic Sensor with Wheel-Shaped Back-Plate Anchor   Jaewoo Lee  EUROCON 2013, pp.2116-2122 0 원문
Conference 2012 Structure-Based Equivalent Circuit Modeling of a Capacitive-Type MEMS Microphone   Jaewoo Lee  International Symposium on Communications and Information Technologies (ISCIT) 2012, pp.228-233 5 원문
Conference 2012 Fabrication of projected capacitive-type window-unified 15” touch sensor     International Conference on Electronic Materials and Nanotechnology for Green Environment (ENGE) 2012, pp.1-1
Journal 2012 Thin MEMS microphone based on package-integrated fabrication process   Jaewoo Lee  Electronics Letters, v.48, no.14, pp.866-867 5 원문
Conference 2011 A Surface-Micromachined MEMS Acoustic Sensor with Back-Plate Anchors of 100 μm Depth   Jaewoo Lee  SENSORS 2011, pp.1-4 6 원문
Conference 2011 The Novel Sensitivity Improved Surface Micromachined MEMS Microphone with the Center-Hole Membrane   Chang Han Je  Eurosensors 2011, pp.583-586 7 원문
Conference 2010 Z-axis Capacitive MEMS Accelerometer with Moving Ground Masses   Chang Han Je  SENSORS 2010, pp.635-638 2 원문
Conference 2010 A surface-micromachined MEMS acoustic sensor with 0.8   Jaewoo Lee  SENSORS 2010, pp.1779-1782 4 원문
Conference 2009 A Surface-Micromachined MEMS Acoustic Sensor with X-Shape Bottom Electrode Anchor   Jaewoo Lee  SENSORS 2009, pp.1313-1316 12 원문
Conference 2008 Sensitivity Tunable Capacitive Type Micro Accelerometer   Chang Han Je  SENSORS 2008, pp.1020-1023 4 원문
Conference 2007 Sensing gap reconfigurable capacitive type MEMS accelerometer   Chang Han Je  Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV (SPIE 6800), v.6800, pp.1-7 5 원문
Conference 2006 A novel capacitive type miniature microphone with a flexure hinge diaphragm   Hye Jin Kim  Optomechatronic Actuators, Manipulation, and Systems Control (SPIE 6374), v.6374, pp.1-8 8 원문
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