Subject

Subjects : Low pressure

  • Articles (15)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2023 Light field microscope target with low power, low pressure reactive ion etching process   Kim Chihoon  Current Applied Physics, v.50, pp.127-132 1 원문
Conference 2018 Laser Irradiation System for n-GaAs Stealth Dicing   Song Hyun Woo  International Photonics and Optoelectronics Meeting (POEM) 2018, pp.1-2 0 원문
Conference 2018 GaAs 기판 분리를 위한 레이저 조사 시스템; 예비 실험   Song Hyun Woo  Optics and Photonics Congress 2018, pp.268-268
Journal 2016 Wafer-scale Crack-free AlGaN on GaN through Two-step Selective-area Growth for Optically Pumped Stimulated Emission   Young-Ho Ko  Journal of Crystal Growth, v.445, pp.78-83 5 원문
Conference 2015 The Highly Stable InGaZnO TFTs Deposited by High Density Plasma Sputtering   Cho Sung Haeng  International Thin-Film Transistor Conference (ITC) 2015, pp.17-18
Conference 2013 Patterning of Submicron Scale Under Low Pressure   Kim Zin Sig  한국 반도체 학술 대회 (KCS) 2013, pp.1-2
Conference 2012 Membrane Sieve Using Stoichiometric and Stress-Reduced SiN/SiO/SiN Multilayer Films and Applications to Plasma Separation   Dae-Sik Lee  SENSORS 2012, pp.1-4 2 원문
Journal 2012 Construction of Membrane Sieves Using Stoichiometric and Stress-Reduced Si3N4/SiO2/Si3N4 Multilayer Films and Their Applications in Blood Plasma Separation   Dae-Sik Lee  ETRI Journal, v.34, no.2, pp.226-234 15 원문
Journal 2011 Characteristics of Schottky Barrier Silicon Nanocluster Floating Gate Flash Memory   손대호  Thin Solid Films, v.519, no.18, pp.6174-6177 0 원문
Journal 2009 Vanadium Dioxide and Vanadium Sesquioxide Thin Films Fabricated on (0001) or (10 10)Al2O3 by Reactive RF-Magnetron Sputter Deposition and Subsequent Annealing Processes   Sun Jin Yun  Japanese Journal of Applied Physics, v.48, no.4, pp.1-4 9 원문
Journal 2008 Polishing damages to electrical properties of BLT thin-film capacitors fabricated by damascene process   김남훈  Electronics Letters, v.44, no.24, pp.1-2 1 원문
Journal 2008 Preparation of V2O3 Thin Films by the Reduction of VO2 in a Very Low Pressure   Sun Jin Yun  Electrochemical and Solid-State Letters, v.11, no.7, pp.H173-H175 6 원문
Journal 2007 Comparative Analysis of VO2 Thin Films Prepared on Sapphire and SiO2/Si Substrates by the Sol-Gel Process   Chae Byung Gyu  Japanese Journal of Applied Physics, v.46, no.2, pp.738-743 30 원문
Journal 2005 Highly Oriented VO2 Thin Films Prepared by Sol-Gel Deposition   Chae Byung Gyu  Electrochemical and Solid-State Letters, v.9, no.1, pp.C12-C14 107 원문
Journal 2003 Optimization of Selective Epitaxial Growth of Silicon in LPCVD   Cheong Woo-Seok  ETRI Journal, v.25, no.6, pp.503-509 8 원문
특허 검색결과
Status Year Patent Name Country Family Pat. KIPRIS
No search results.
연구보고서 검색결과
Type Year Research Project Primary Investigator Download
No search results.