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Journal
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2023 |
Wide-wavelength–tunable distributed Bragg reflector laser diode with high thermal efficiency
Chul-Wook Lee Optics Express, v.31, no.20, pp.32126-32133 |
4 |
원문
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Journal
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2016 |
TiN/PECVD-Si3N4/TiN Diaphragm-based Capacitive-type MEMS Acoustic Sensor
Jaewoo Lee Electronics Letters, v.52, no.6, pp.468-470 |
6 |
원문
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Journal
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2015 |
A Concave-Patterned TiN/PECVD-Si3N4 /TiN Diaphragm MEMS Acoustic Sensor Based on a Polyimide Sacrificial Layer
Jaewoo Lee Journal of Micromechanics and Microengineering, v.25, no.12, pp.1-13 |
8 |
원문
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Conference
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2015 |
A Capacitive-Type MEMS Acoustic Sensor with a Diaphragm of Al/Si3N4/Al Based on a Polyimide Sacrificial Layer
Jaewoo Lee International Conference on Electronics, Information and Communication (ICEIC) 2015, pp.228-229 |
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Journal
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2014 |
Bottom‐inlet‐type micro‐electro‐mechanical system acoustic sensors based on two polyimide/amorphous‐Si sacrificial layers
Jaewoo Lee IET Micro & Nano Letters, v.9, no.12, pp.845-849 |
1 |
원문
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Conference
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2014 |
Bottom-inlet-type MEMS Acoustic Sensors based on Two Polyimide/A-Si Sacrificial Layers
Jaewoo Lee Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT) 2014, pp.1-2 |
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Conference
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2011 |
A Surface-Micromachined MEMS Acoustic Sensor with Back-Plate Anchors of 100 μm Depth
Jaewoo Lee SENSORS 2011, pp.1-4 |
6 |
원문
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Conference
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2008 |
Surface-Micromachined Deep Back Chamber MEMS Acoustic Sensor Using Two Sacrificial Layers
Jaewoo Lee SENSORS 2008, pp.569-572 |
5 |
원문
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Journal
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2008 |
Surface-micromachined MEMS acoustic sensor with bottom electrode anchors
Jaewoo Lee Electronics Letters, v.44, no.9, pp.1-2 |
2 |
원문
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Journal
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2007 |
Air-suspended Two-dimensional Polymer Photonic Crystal Slab Waveguides Fabricated by Nanoimprint Lithography
Choi Choon Gi Applied Physics Letters, v.90, no.22, pp.1-3 |
26 |
원문
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Journal
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2006 |
Micromachined Air-Gap Structure MEMS Acoustic Sensor using Reproducible High-Speed Lateral Etching and CMP Process
Sang Choon Ko Journal of Micromechanics and Microengineering, v.16, no.10, pp.2071-2076 |
15 |
원문
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Journal
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2006 |
Fabrication of Nano-Gap Electrode Pairs Using Atomic-Layer-Deposited Sacrificial Layer and Shadow Deposition
Park Chan Woo Japanese Journal of Applied Physics, v.45, no.5A, pp.4293-4295 |
1 |
원문
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Journal
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2004 |
Surface micromachined thermally driven micropump
Jang Won Ick Sensors and Actuators A : Physical, v.115, no.1, pp.151-158 |
21 |
원문
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