Subject

Subjects : Sacrificial layer

  • Articles (13)
  • Patents (2)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2023 Wide-wavelength–tunable distributed Bragg reflector laser diode with high thermal efficiency   Chul-Wook Lee  Optics Express, v.31, no.20, pp.32126-32133 4 원문
Journal 2016 TiN/PECVD-Si3N4/TiN Diaphragm-based Capacitive-type MEMS Acoustic Sensor   Jaewoo Lee  Electronics Letters, v.52, no.6, pp.468-470 6 원문
Journal 2015 A Concave-Patterned TiN/PECVD-Si3N4 /TiN Diaphragm MEMS Acoustic Sensor Based on a Polyimide Sacrificial Layer   Jaewoo Lee  Journal of Micromechanics and Microengineering, v.25, no.12, pp.1-13 8 원문
Conference 2015 A Capacitive-Type MEMS Acoustic Sensor with a Diaphragm of Al/Si3N4/Al Based on a Polyimide Sacrificial Layer   Jaewoo Lee  International Conference on Electronics, Information and Communication (ICEIC) 2015, pp.228-229
Journal 2014 Bottom‐inlet‐type micro‐electro‐mechanical system acoustic sensors based on two polyimide/amorphous‐Si sacrificial layers   Jaewoo Lee  IET Micro & Nano Letters, v.9, no.12, pp.845-849 1 원문
Conference 2014 Bottom-inlet-type MEMS Acoustic Sensors based on Two Polyimide/A-Si Sacrificial Layers   Jaewoo Lee  Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT) 2014, pp.1-2
Conference 2011 A Surface-Micromachined MEMS Acoustic Sensor with Back-Plate Anchors of 100 μm Depth   Jaewoo Lee  SENSORS 2011, pp.1-4 6 원문
Conference 2008 Surface-Micromachined Deep Back Chamber MEMS Acoustic Sensor Using Two Sacrificial Layers   Jaewoo Lee  SENSORS 2008, pp.569-572 5 원문
Journal 2008 Surface-micromachined MEMS acoustic sensor with bottom electrode anchors   Jaewoo Lee  Electronics Letters, v.44, no.9, pp.1-2 2 원문
Journal 2007 Air-suspended Two-dimensional Polymer Photonic Crystal Slab Waveguides Fabricated by Nanoimprint Lithography   Choi Choon Gi  Applied Physics Letters, v.90, no.22, pp.1-3 26 원문
Journal 2006 Micromachined Air-Gap Structure MEMS Acoustic Sensor using Reproducible High-Speed Lateral Etching and CMP Process   Sang Choon Ko  Journal of Micromechanics and Microengineering, v.16, no.10, pp.2071-2076 15 원문
Journal 2006 Fabrication of Nano-Gap Electrode Pairs Using Atomic-Layer-Deposited Sacrificial Layer and Shadow Deposition   Park Chan Woo  Japanese Journal of Applied Physics, v.45, no.5A, pp.4293-4295 1 원문
Journal 2004 Surface micromachined thermally driven micropump   Jang Won Ick  Sensors and Actuators A : Physical, v.115, no.1, pp.151-158 21 원문
특허 검색결과
Status Year Patent Name Country Family Pat. KIPRIS
Registered 2013 VERTICAL-CAVITY SURFACE-EMITTING LASER AND METHOD OF FABRICATING THE SAME UNITED STATES
Registered 2013 CONDENSER MICORPHONE HAVING FLEXURE HINGE DIAPHRAGM AND METHOD OF MANUFACTURING THE SAME UNITED STATES
연구보고서 검색결과
Type Year Research Project Primary Investigator Download
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