Subject

Subjects : Plasma Etching

  • Articles (14)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Conference 2019 Normally-off Field Effect Transistors using fine controlled Recess under Gate Area on AlGaN/GaN Heterostructures   Kim Zin-Sig  대한전자공학회 학술 대회 (추계) 2019, pp.215-218
Journal 2015 Preparation and Characterization of a Triple Layered Au-PMMA-PbSe Hybrid Nanocomposite: Manipulation of PMMA Spacer Layer by Oxygen Plasma Etching   Kim Wan Joong  Bulletin of the Korean Chemical Society, v.36, no.8, pp.1966-1973 2 원문
Journal 2015 Fabrication of a Large‐Area Hierarchical Structure Array by Combining Replica Molding and Atmospheric Pressure Plasma Etching   Bong Kuk Lee  Advanced Materials Interfaces, v.2, no.11, pp.1-8 12 원문
Journal 2015 Fabrication of Large-Area Hierarchical Structure Array using Siliconized-Silsesquioxane as a Nanoscale Etching Barrier   Bong Kuk Lee  ACS Applied Materials & Interfaces, v.7, no.24, pp.13490-13496 9 원문
Conference 2013 Sub-22 nm Silicon Template Nanofabrication by Advanced Spacer Patterning Technique for NIL Applications   Park Jong-Moon  Alternative Lithographic Technologies V (SPIE 8680), pp.1-8 0 원문
Journal 2011 Effect of Deposition Conditions and Crystallinity of Substrate on Phase Transition of Hydrogenated Si Films   김준관  Journal of the Electrochemical Society, v.158, no.7, pp.D430-D434 7 원문
Journal 2010 Optimum Condition of Anisotropic Plasma Etching for Improving Bending Properties of Ionic Polymer-Metal Composites   Choi Nak Jin  Journal of Nanoscience and Nanotechnology, v.10, no.5, pp.3299-3303 9 원문
Conference 2008 Optimum Condition of Anisotropic Plasma Etching for Improving Bending Properties of Ionic Polymer-Metal Composites   Choi Nak Jin  International Conference on Nano Science and Nano Technology (GJ-NST) 2008, pp.1-1
Journal 2008 Electroactive Polymer Actuator with High Response Speed Through Anisotropic Surface Roughening by Plasma Etching   Choi Nak Jin  Journal of Nanoscience and Nanotechnology, v.8, no.10, pp.5385-5388 22 원문
Journal 2006 Dry Etching of Ge2Sb2Te5 Thin Films into Nanosized Patterns Using TiN Hard Mask   Yoon Sung Min  Japanese Journal of Applied Physics, v.45, no.40, pp.1080-1083 21 원문
Journal 2005 Etching Characteristics of Ge2Sb2Te5 Using High-Density Helicon Plasma for the Nonvolatile Phase-Change Memory Applications   Yoon Sung Min  Japanese Journal of Applied Physics, v.44, no.24-27, pp.L869-L872 36 원문
Conference 2005 EBL Patterning of Sub-10 nm Line Using HSQ with Plasma Etching Process and Fabricating of Triple-Gate MOS Transistors with 6 nm Gate Length   Baek In Bok  Silicon Nanoelectronics Workshop (SNW) 2005, pp.16-17
Journal 2002 An Etch-Stop Technique Using Cr2O3 Thin Film and Its Application to Silica PLC Platform Fabrication   Shin Jang Uk  ETRI Journal, v.24, no.5, pp.398-400 8 원문
Conference 2001 Effects of O/sub 2//C/sub 2/F/sub 6/ plasma descum with RF cleaning on via formation in MCM-D substrate using photosensitive BCB   Ju Chull Won  Electronic Components and Technology Conference (ECTC) 2001, pp.1-3 원문
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