ETRI-Knowledge Sharing Plaform

KOREAN
연구보고서 검색
Type Funding Org. Research Org.
Year ~ Keyword

Detail

The Service Project of Semiconductor Foundry
Download 205 time
Participants
Jin-Yeong Kang, Oh Myoungsook, Bae Yoon Kyu, Kim Sang Gi, Lee Hee Tae, Lim Byung Won, Kim Bo Woo, Yu Hyun Kyu, Hee-Bum Jung, Yoon Yong Sun, Hyung Sup Yoon, Park Jong-Moon, Lee Kyung Ho, Mun Jae Kyoung, Hae Cheon Kim, Lee Kyung Ho, Yoo Seong Wook, Woojin Chang, Lee Sang-Heung, Kim Dong-Young, Jong-Won Lim, Kim Seong-Il, Min Byoung-Gue, Ji Hong Gu, Park Kun Sik, Dong Min Kang, Hokyun Ahn, Lee Ja Yol, Jongmin Lee, Koo Jin-Gun
Published
200912
Type
Final Report
Keyword
공정 기술, HDP, HTO, SiON, CMP, DMOS, WL-IPD, High Temperature Oxide, Oxynitride, Chemical Mechanical Polishing, Wafer-level Integrated Passive Device
Funding Org.
한국전자통신연구원
Research Org.
한국전자통신연구원
Project Code
09ZB1400, Development support for customer-based convergence components, Hee-Bum Jung