Subject

Subjects : E-beam lithography

  • Articles (18)
  • Patents (1)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2023 Multilayer all-polymer metasurface stacked on optical fiber via sequential micro-punching process   김무혁  NANOPHOTONICS, v.12, no.13, pp.2359-2369 14 원문
Journal 2017 Characteristics of Enhanced-Mode AlGaN/GaN MIS HEMTs for Millimeter Wave Applications   Jongmin Lee  Journal of the Korean Physical Society, v.71, no.6, pp.365-369 7 원문
Conference 2016 Temperature Dependence of Current-voltage Characteristics of Packaged AlGaN/GaN HEMT on SiC Substrate   Jongmin Lee  한국 반도체 학술 대회 (KCS) 2016, pp.1-2
Journal 2015 A Multi-Channel Etched-Mesa PBH DFB Laser Array Using an SAG Technique   Oh Su Hwan  IEEE Photonics Technology Letters, v.27, no.24, pp.2567-2570 10 원문
Journal 2015 Multi‐wavelength channel 1.5 μm and 10 Gb/s EMBH DFB‐LD array module using SAG technology   Kwon Oh Kee  Electronics Letters, v.51, no.22, pp.1771-1772 2 원문
Journal 2014 A 10 × 10-Gb/s DFB-LD Array Integrated With PLC-Based AWG for 100-Gb/s Transmission   Kwon Oh Kee  IEEE Photonics Technology Letters, v.26, no.21, pp.2177-2180 11 원문
Journal 2012 Low Temperature Characteristics of Schottky Barrier Single Electron and Single Hole Transistors   Jang Moon Gyu  ETRI Journal, v.34, no.6, pp.950-953 1 원문
Journal 2012 Nanogap-Based Electrical PNA Chips for the Detection of Genetic Polymorphism of Cytochrome P450 2C19   박대근  Journal of Nanoscience and Nanotechnology, v.12, no.7, pp.5155-5159 2 원문
Journal 2009 Adjusting Resonant Wavelengths and Spectral Shapes of Ring Resonators using a Cladding SiN Layer or KOH Solution   Park Sahnggi  Optics Express, v.17, no.14, pp.11884-11891 8 원문
Conference 2009 Identifying Resonance Frequency Deviations for High Order Nano-Wire Ring Resonator Filters based on a Coupling Strength Variation   Park Sahnggi  Silicon Photonics IV (SPIE 7220), v.7220, pp.1-12 0 원문
Journal 2007 Fabrication and Atmospheric-Pressure-Dependent Electrical Properties of a ZnO Nanowire Device   Kim Eunkyoung  Journal of the Korean Physical Society, v.51, pp.S170-S173 15
Conference 2006 Atmosphere Pressure Dependent Electrical Properties of the ZnO Nanowire Transistors   Kim Eunkyoung  Nanotechnology Materials and Devices Conference (NMDC) 2006, pp.1-2
Conference 2006 Electrical Characterization of Semiconducting Nanowire and Its Application to a Chemical Sensor   Kang-Ho Park  The Electrochemical Society (ECS) Meeting 2006, pp.231-237 0 원문
Conference 2006 Comparative Study of DC and Microwave Characteristics of 0.12 μm T-Shaped Gate AlGaAs/InGaAs/GaAs PHEMTs Using a Hybrid and Conventional E-beam Lithography Process   Jong-Won Lim  International Conference on Solid State Devices and Materials (SSDM) 2006, pp.956-957 원문
Conference 2006 50㎚ E-Beam Lithography Process using a Bilayer Resist Structure for Nano T-gate MHEMTs   Shim Jae Yeob  International Symposium on the Physics of Semiconductors and Applications (ISPSA) 2006, pp.1-1
Conference 2006 Semiconducting Nanowire Device Characterization for a Chemical Sensor   Park Jonghyurk  International Meeting on Chemical Sensors (IMCS) 2006, pp.1-2
Journal 2005 SOI single-electron transistor with low RC delay for logic cells and SET/FET hybrid ICs   Kim Dong Kyu  IEEE Transactions on Nanotechnology, v.4, no.2, pp.242-248 42 원문
Journal 2002 Monolithic integration of a multiwavelength laser array associated with asymmetric sampled grating lasers   Sang-Wan Ryu  IEEE Journal of Selected Topics in Quantum Electronics, v.8, no.6, pp.1358-1365 25 원문
특허 검색결과
Status Year Patent Name Country Family Pat. KIPRIS
Registered 2006 METHOD OF FABRICATING NANOIMPRINT MOLD UNITED STATES
연구보고서 검색결과
Type Year Research Project Primary Investigator Download
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