Subject

Subjects : Reactive ion etching

  • Articles (27)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2024 Effect of inductively coupled plasma etch on the interface barrier behavior of (001) β-Ga2O3 Schottky barrier diode   Lee Hun Ki  JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.42, no.4, pp.1-10 2 원문
Journal 2023 Light field microscope target with low power, low pressure reactive ion etching process   Kim Chihoon  Current Applied Physics, v.50, pp.127-132 1 원문
Conference 2017 P‐179: Enhanced Light Extraction from Organic Light‐Emitting Diodes using a Quasi‐periodic Nanostructure   이주성  Society for Information Display (SID) International Symposium 2017, pp.1947-1948 0 원문
Journal 2017 Flexible Transparent Displays Based on Core/Shell Upconversion Nanophosphor-incorporated Polymer Waveguides   홍아라  Scientific Reports, v.7, pp.1-11 34 원문
Journal 2017 Flexible Transparent Displays Based on Core/Shell Upconversion Nanophosphor-incorporated Polymer Waveguides   Bong Je Park  Scientific Reports, v.7, pp.1-11 34 원문
Journal 2016 Effect of Fluoride-based Plasma Treatment on the Performance of AlGaN/GaN MISFET   Hokyun Ahn  ETRI Journal, v.38, no.4, pp.675-684 5 원문
Journal 2015 Power Trench Gate MOSFET with an Integrated 6-Pack Configuration for a 3-Phase Inverter   Won Jong Il  Journal of the Korean Physical Society, v.67, no.7, pp.1214-1221 2 원문
Journal 2013 Reverse-Conducting IGBT Using MEMS Technology on the Wafer Back Side   Won Jong Il  ETRI Journal, v.35, no.4, pp.603-609 12 원문
Conference 2013 A Bottom-Inlet type MEMS Acoustic Sensor with Wheel-Shaped Back-Plate Anchor   Jaewoo Lee  EUROCON 2013, pp.2116-2122 0 원문
Journal 2013 Micromachined stress-free TSV hole for AlGaN/GaN-on-Si (1 1 1) platform-based devices   Sang Choon Ko  Journal of Micromechanics and Microengineering, v.23, no.3, pp.1-7 3 원문
Journal 2011 High-Resolution Capacitive Microinclinometer With Oblique Comb Electrodes Using (110) Silicon   정대훈  IEEE Journal of Microelectromechanical Systems, v.20, no.6, pp.1269-1276 12 원문
Conference 2011 A Surface-Micromachined MEMS Acoustic Sensor with Back-Plate Anchors of 100 μm Depth   Jaewoo Lee  SENSORS 2011, pp.1-4 6 원문
Conference 2011 Micro/Nano Fabrication of Nanopores Formed Through SiN   Dae-Sik Lee  Eurosensors 2011, pp.884-887 2 원문
Journal 2011 Dual Etch Processes of Via and Metal Paste Filling for Through Silicon Via Process   함용현  Thin Solid Films, v.519, no.20, pp.6727-6731 26 원문
Journal 2011 Microfabrication of SiN Membrane Nanosieve Using Anisotropic Reactive Ion Etching (ARIE) with an Ar/CF4 Gas Flow   Dae-Sik Lee  Journal of Nanoscience and Nanotechnology, v.11, no.5, pp.4511-4516 8 원문
Journal 2010 Fabrication of Micro-Lens Arrays with Moth-Eye Antireflective Nanostructures using Thermal Imprinting Process   Oh Sang Soon  Microelectronic Engineering, v.87, no.11, pp.2328-2331 67 원문
Journal 2009 Fabrication of morphological defect-free vertical electrodes using a (1 1 0) silicon-on-patterned-insulator process for micromachined capacitive inclinometers   윤성식  Journal of Micromechanics and Microengineering, v.19, no.3, pp.1-7 21 원문
Conference 2009 Novel Micro Capacitive Inclinometer with Oblique Comb Electrode and Suspension Spring Aligned Parallel to {111} Vertical Planes of (110) Silicon   정대훈  International Conference on Micro Electro Mechanical Systems (MEMS) 2009, pp.797-800 4 원문
Conference 2008 Capacitive Micro Inclinometer with Scalloping-Free and Footing-Free Vertical Electrodes using Crystalline Etching of (110) Silicon   윤성식  SENSORS 2008, pp.662-665 0 원문
Journal 2008 Micro-Electro-Mechanical-Systems-Based Infrared Spectrometer Composed of Multi-Slit Grating and Bolometer Array   양재창  Japanese Journal of Applied Physics, v.47, no.8, pp.6943-6948 17 원문
Conference 2006 Optical Transmitter Module using Polymer Waveguide with Fully Integrated Reflector Mirrors   Cho In Kui  Passive Components and Fiber-based Devices III (APOC) 2006 (SPIE 6351), v.6351, pp.1-7 0 원문
Journal 2006 Design and Optical Properties of ZnS: Mn Thin-Film Electroluminescent Devices on 2D SiO2 Corrugated Photonic Crystal Substrates   도영락  Journal of the Electrochemical Society, v.153, no.4, pp.H71-H77 3 원문
Journal 2005 Nanofabrication of InGaAsP periodic 2D columns with square and hexagonal lattices by reactive ion etching   이지면  Thin Solid Films, v.475, no.1-2, pp.189-193 8 원문
Journal 2004 Fabrication and characterization of a bidirectional valveless peristaltic micropump and its application to a flow-type immunoanalysis   Dae-Sik Lee  Sensors and Actuators B : Chemical, v.103, no.1-2, pp.409-415 28 원문
Journal 2003 The design and the fabrication of monolithically integrated GaInAsP MQW laser with butt-coupled waveguide   Oh Su Hwan  IEEE Photonics Technology Letters, v.15, no.10, pp.1339-1341 27 원문
Journal 2002 Characterization of Via Etching in CHF3/CF4 Magnetically Enhanced Reactive Ion Etching Using Neural Networks   Kwon Sung-Ku  ETRI Journal, v.24, no.3, pp.211-220 10 원문
Conference 2002 The Effects of Plasma Induced Damage on The Channel Layers of Ion Implanted GaAs MESFETs during Reactive Ion Etching(RIE) and Plasma Ashing Processes   Hokyun Ahn  Materials Research Society (MRS) Meeting 2002 (Spring), v.720, pp.67-72 1 원문
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