18ZB1100, Development of Basic Technologies for 3D Photo-Electronics,
Baek Yongsoon
Abstract
<연구내용 및 범위> ㅇ 3D Photo-Electronics 원천기술 확보 - 실리콘 레이저 기술개발 - 3D 집적용 아날로그 IC 및 3D 패키징 기술개발 - 광집적용 서브파장 능동 메타물질 기술개발 - 데이터센터용 3D 광전집적 광송수신기 기술개발
ㅇ 이종결합 기반기술 - III-V on Si 성장기술 및 실리콘 레이저 기술 - 메타물질 기반기술 및 능동 제어 소자 기술 - 이종결합용 나노소재 원자층 제어 기술
ㅇ 3D 집적기술 - 3D 광전집적 소자 설계, 공정 및 집적화 기술 - 실리콘 인터포저 설계, 이종 디바이스 3D 집적 및 초고속 광배선 기술
ㅇ 3D 응용 소자 기술 - 광전집적회로 기술 및 초고집적 3D 광송수신 모듈 기술 - 메타 광부품 기술 및 메타물질 기반 3D 나노포토닉스 기반기술
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