Subject

Subjects : RF magnetron sputter

  • Articles (16)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Conference 2012 The Properties of SiOC Thin Film via Reactive RF Magnetron Sputter Method   Kim Kyung Hyun  International Materials Research Congress (IMRC) 2012
Journal 2010 Effect of Rf-Power Density on the Resistivity of Ga-Doped ZnO Film Deposited by Rf-Magnetron Sputter Deposition Technique   Jun Kwan Kim  Current Applied Physics, v.10, no.3 SUPPL., pp.S451-S454 35 원문
Journal 2010 High-Performance Transparent Conducting Ga-Doped ZnO Films Deposited by RF Magnetron Sputter Deposition   Jun Kwan Kim  Japanese Journal of Applied Physics, v.49, no.4 PART 2, pp.1-4 16 원문
Conference 2009 Rf-Magnetron Sputter 증착 기술을 이용한 태양 전지용 p형 비정질 실리콘 박막의 특성 분석   Lee Seong Hyun  한국진공학회 학술 대회 (하계) 2009, pp.273-273
Conference 2009 Electrical Properties and Thermal Stability of Ga-doped ZnO Thin Film Deposited by RF-Magnetron Sputter Deposition Technique   Jun Kwan Kim  International Photovoltaic Science and Engineering Conference (PVSEC) 2009, pp.1-1
Conference 2009 High Performance Transparent Conducting Ga-Doped ZnO film Deposited by RF-Magnetron Sputter Deposition Technique   Jun Kwan Kim  International Conference on Solid State Devices and Materials (SSDM) 2009, pp.1-2
Journal 2009 Fabrication of P-Type ZnO Thin Films Using Rf-Magnetron Sputter Deposition   Jun Kwan Kim  Electrochemical and Solid-State Letters, v.12, no.4, pp.H109-H112 15 원문
Journal 2009 Vanadium Dioxide and Vanadium Sesquioxide Thin Films Fabricated on (0001) or (10 10)Al2O3 by Reactive RF-Magnetron Sputter Deposition and Subsequent Annealing Processes   Sun Jin Yun  Japanese Journal of Applied Physics, v.48, no.4, pp.1-4 9 원문
Journal 2009 Passivation of Bottom-Gate IGZO Thin Film Transistors   Cho Doo-Hee  Journal of the Korean Physical Society, v.54, no.1, pp.531-534 43 원문
Journal 2009 Combinatorial Approach to the Fabrication of Zinc-Tin-Oxide Transparent Thin-Film Transistors   Cheong Woo-Seok  Journal of the Korean Physical Society, v.54, no.1, pp.544-548 9 원문
Conference 2008 Red-shift of the Photoluminescence Peak of N-doped ZnO Phosphors   Jun Kwan Kim  International Meeting on Information Display (IMID) 2008, pp.895-897
Conference 2008 VO2 and V2O3 Films Fabricated on (1000) or (1010)Al2O3 by Reactive RF-Magnetron Sputter Deposition and Annealing Processes   Sun Jin Yun  International Conference on Solid State Devices and Materials (SSDM) 2008, pp.1-2
Journal 2008 Characteristics of Vanadium Dioxide Films Deposited by RF-magnetron Sputter Deposition Technique using V-metal Target   Sun Jin Yun  Physica B : Condensed Matter, v.403, no.5-9, pp.1381-1383 20 원문
Journal 2008 Vanadium Dioxide Films Deposited on Amorphous SiO2- and Al2O3-Coated Si Substrates by Reactive RF-Magnetron Sputter Deposition   Sun Jin Yun  Japanese Journal of Applied Physics, v.47, no.4, pp.3067-3069 22 원문
Conference 2007 Vanadium Dioxide Films Deposited on SiO2- and Al2O3-coated Si Substrates Using Reactive RF-Magnetron Sputter Deposition Technique   Sun Jin Yun  International Conference on Solid State Devices and Materials (SSDM) 2007, pp.564-565
Journal 2004 고성능 저온 폴리실리콘 소자 특성   Kim Yong Hae  IEEE Electron Device Letters, v.25, no.8, pp.550-552 27 원문
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