Subject

Subjects : Wet etching

  • Articles (26)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Conference 2024 GaAs mHEMT Technology Achieving a High Cut-off Frequncy of 446 GHz with a Gate Length of 75 nm   Park Jongyul  International Conference on Information and Communication Technology Convergence (ICTC) 2024, pp.1468-1469 0 원문
Journal 2023 Analysis of issues in gate recess etching in the InAlAs/InGaAs HEMT manufacturing process   Min Byoung-Gue  ETRI Journal, v.45, no.1, pp.171-179 4 원문
Journal 2020 A Study on the Behavior of Gate Recess Etch by Photoresist Openings on Ohmic Electrode in InAlAs/InGaAs mHEMT Devices   Min Byoung-Gue  Journal of the Korean Physical Society, v.77, no.2, pp.122-126 4 원문
Journal 2017 Large Size of Capacitive Window-Unified TSP Using by Contact Hole Type as an Insulator   Seo Woo Hyung  Journal of Nanoscience and Nanotechnology, v.17, no.5, pp.3089-3091 0 원문
Journal 2015 The Effects of Electrodes Patterned onto the Piezoelectric Thin Film on Frequency Response Characteristics of PMN-PT MEMS Acoustic Actuators   Hye Jin Kim  Journal of Electroceramics, v.35, no.1, pp.45-52 10 원문
Conference 2013 Sub-22 nm Silicon Template Nanofabrication by Advanced Spacer Patterning Technique for NIL Applications   Park Jong-Moon  Alternative Lithographic Technologies V (SPIE 8680), pp.1-8 0 원문
Journal 2012 Nanopattern Fabrication via AP-UVO Exposure of a Self-Organized Block Copolymer   Jeong Ye Sul  Journal of the Korean Physical Society, v.60, no.3, pp.501-504 1 원문
Journal 2012 Electrowetting Lens Employing Hemispherical Cavity Formed by Hydrofluoric Acid, Nitric Acid, and Acetic Acid Etching of Silicon   이준규  Japanese Journal of Applied Physics, v.51, no.6 PART 2, pp.1-7 11 원문
Conference 2012 태양전지 적용을 위한 Silicon 기판의 표면처리 효과에 관한 연구   연창봉  한국진공학회 학술 대회 (동계) 2012, pp.592-592
Journal 2011 High-Resolution Capacitive Microinclinometer With Oblique Comb Electrodes Using (110) Silicon   정대훈  IEEE Journal of Microelectromechanical Systems, v.20, no.6, pp.1269-1276 12 원문
Journal 2010 A silicon nitride microdisk resonator with a
40-nm-thin horizontal air slot   이신영  Optics Express, v.18, no.11, pp.11209-11215 38 원문
Journal 2009 Process development of ITO source/drain electrode for the top-gate indium–gallium–zinc oxide transparent thin-film transistor   Cheong Woo-Seok  Thin Solid Films, v.517, no.14, pp.4094-4099 23 원문
Journal 2009 Transparent and Photo‐stable ZnO Thin‐film Transistors to Drive an Active Matrix Organic‐Light‐ Emitting‐Diode Display Panel   Park Sang-Hee  Advanced Materials, v.21, no.6, pp.678-682 338 원문
Journal 2009 Fabrication of morphological defect-free vertical electrodes using a (1 1 0) silicon-on-patterned-insulator process for micromachined capacitive inclinometers   윤성식  Journal of Micromechanics and Microengineering, v.19, no.3, pp.1-7 21 원문
Conference 2009 Novel Micro Capacitive Inclinometer with Oblique Comb Electrode and Suspension Spring Aligned Parallel to {111} Vertical Planes of (110) Silicon   정대훈  International Conference on Micro Electro Mechanical Systems (MEMS) 2009, pp.797-800 4 원문
Conference 2008 Highly Conductive and Transparent Electrodes for the Application of AM-OLED Display   Ryu Min Ki  International Meeting on Information Display (IMID) 2008, pp.813-815 1
Journal 2008 Nonuniform Output Characteristics of Laser Diode with Wet-etched Spot-size Converter   Choe Joong-Seon  Optics Express, v.16, no.8, pp.5790-5796 2 원문
Journal 2007 Transparent ZnO-TFT Arrays Fabricated by Atomic Layer Deposition   Park Sang-Hee  Electrochemical and Solid-State Letters, v.11, no.1, pp.H10-H14 104 원문
Journal 2006 Fabrication of Reliable Self-Aligned InP/InGaAs/InP Double Heterojunction Bipolar Transistor with Hexagonal Emitter Mesa Structure   Min Byoung-Gue  Journal of the Korean Physical Society, v.49, no.3, pp.S780-S783
Journal 2006 Comparative study on Chemical Stability of Dielectric Oxide Films under HF Wet and Vapor Etching for Radiofrequency Microelectromechanical System Application   Yang Woo Seok  Thin Solid Films, v.500, no.1-2, pp.231-236 20 원문
Journal 2005 A Comparative Study of a Dielectric-Defined Process on AlGaAs/InGaAs/GaAs PHEMTs   Jong-Won Lim  ETRI Journal, v.27, no.3, pp.304-311 8 원문
Journal 2005 Nanofabrication of InGaAsP periodic 2D columns with square and hexagonal lattices by reactive ion etching   이지면  Thin Solid Films, v.475, no.1-2, pp.189-193 8 원문
Journal 2003 The design and the fabrication of monolithically integrated GaInAsP MQW laser with butt-coupled waveguide   Oh Su Hwan  IEEE Photonics Technology Letters, v.15, no.10, pp.1339-1341 27 원문
Journal 2003 Near room-temperature continuous-wave operation of all-monolithic InAlGaAs∕InP 1.3 [micro sign]m VCSELs   Jaeheon Shin  Electronics Letters, v.39, no.8, pp.664-665 14 원문
Journal 2002 Active-Matrix Field Emission Display with Amorphous Silicon Thin-Film Transistors and Mo-Tip Field Emitter Arrays   Yoon-Ho Song  ETRI Journal, v.24, no.4, pp.290-298 26 원문
Journal 2002 액티브-매트릭스 캐소드를 위한 비정질 실리콘 박막 트랜지스터와 Mo-팁의 집적화 및 특성 분석   Kim Do-Hyung  IEEE Transactions on Electron Devices, v.49, no.7, pp.1136-1142 3 원문
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