Subject

Subjects : Plasma-enhanced chemical vapor deposition (PECVD)

  • Articles (24)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2021 Organic/Inorganic Hybrid Thin-Film Encapsulation Using Inkjet Printing and PEALD for Industrial Large-Area Process Suitability and Flexible OLED Application   Kwon Byoung-Hwa  ACS Applied Materials & Interfaces, v.13, no.46, pp.54621-55766 36 원문
Journal 2018 Enhanced Carrier Transport Properties in GaN-Based Metal-Insulator-Semiconductor High Electron Mobility Transistor with SiN/Al2O3 Bi-Layer Passivation   Sungjae Chang  ECS Journal of Solid State Science and Technology, v.7, no.6, pp.86-90 8 원문
Journal 2016 Multi-Layered Hydrogenated P-Type Microcrystalline Silicon Windows for a-Si:H Thin Film Solar Cells on Opaque Substrates   Lee Yoo Jeong  International Journal of Hydrogen Energy, v.41, no.15, pp.6240-6246 4 원문
Journal 2016 TiN/PECVD-Si3N4/TiN Diaphragm-based Capacitive-type MEMS Acoustic Sensor   Jaewoo Lee  Electronics Letters, v.52, no.6, pp.468-470 6 원문
Conference 2015 The Highly Stable InGaZnO TFTs Deposited by High Density Plasma Sputtering   Cho Sung Haeng  International Thin-Film Transistor Conference (ITC) 2015, pp.17-18
Journal 2013 Phase Transition of Hydrogenated SiGe Thin Films in Plasma-Enhanced Chemical Vapor Deposition   Sun Jin Yun  Thin Solid Films, v.546, pp.362-366 3 원문
Journal 2013 Fabrication of Enhancement-Mode AlGaN/GaN High Electron Mobility Transistors Using Double Plasma Treatment   Jong-Won Lim  Thin Solid Films, v.547, pp.106-110 10 원문
Journal 2013 Transparent Non-Volatile Memory Device Using Silicon Quantum Dots   Rae-Man Park  Electronic Materials Letters, v.9, no.4, pp.467-469 6 원문
Journal 2013 Effect of Hydrogen Plasma Treatment on Nano-Structured TiO2 Films for the Enhanced Performance of Dye-Sensitized Solar Cell   김형진  Applied Surface Science, v.274, pp.171-175 43 원문
Conference 2012 Crystallization of Hydrogenated SiGe Thin Films Deposited by Plasma-Enhanced Chemical Vapor Deposition     IUMRS International Conference in Asia (IUMRS-ICA) 2012, pp.1-1
Journal 2011 Comparative Study of Silicon Quantum Dot Formation In-situ Grown with a Gas Mixture of SiH4+N2 and SiH4+NH3   Tae-Youb Kim  Journal of the Korean Physical Society, v.59, no.2, pp.308-311 2 원문
Journal 2011 Effect of Deposition Conditions and Crystallinity of Substrate on Phase Transition of Hydrogenated Si Films   김준관  Journal of the Electrochemical Society, v.158, no.7, pp.D430-D434 7 원문
Journal 2010 Fabrication of a Nanosize Pattern Embedded Plastic Chip via an Injection Molding Method for Application to an Optical Biosensor   Kim Kyung Hyun  International Polymer Processing, v.25, no.5, pp.341-345 2 원문
Conference 2010 The Thickness Effect of SiOx Layer in CIGS Thin-Film Solar Cells Fabricated on Stainless-Steel Substrate   Chung Yong-Duck  Photovoltaic Specialists Conference (PVSC) 2010, pp.3401-3402 3 원문
Journal 2009 Evaluation of 1/f Noise Characteristics for Si-Based Infrared Detection Materials   Ryu Hojun  ETRI Journal, v.31, no.6, pp.703-708 3 원문
Conference 2008 Sputtered Silicon Antimony Thin Film for The Infrared Detection Layer of Microbolometer   Ryu Hojun  SENSORS 2008, pp.301-304 0 원문
Conference 2008 1/f Noise Characteristics of Sputtered Silicon Antimony Thin Film for Microbolometer   Ryu Hojun  Eurosensors 2008, pp.877-880
Journal 2006 Fabrication and Characteristics of 0.12 μm Single and Double-Recessed Gate AlGaAs/InGaAs/GaAs PHEMTs Using a SiNx Pre-Passivation Layer   Jong-Won Lim  Journal of the Korean Physical Society, v.49, no.3, pp.S774-S779
Journal 2006 High Negative Differential Resistance in Silicon Quantum Dot Metal-Insulator-Semiconductor Structure   Rae-Man Park  Applied Physics Letters, v.89, no.15, pp.1-3 14 원문
Journal 2006 Comparative Study of DC and Microwave Characteristics of 0.12 µm Double-Recessed Gate AlGaAs/InGaAs/GaAs Pseudomorphic High-Electron-Mobility Transistors Using Dielectric-Assisted Process   Jong-Won Lim  Japanese Journal of Applied Physics, v.45, no.4B, pp.3358-3363 0 원문
Conference 2006 Fabrication and Characteristics of 0.12 μm Single and Double-Recessed Gate AlGaAs/InGaAs/GaAs PHEMTs Using a SiNx Pre-Passivation Layer   Jong-Won Lim  한국반도체 학술 대회 (KCS) 2006, pp.1-2
Journal 2005 원자층증착법에 의한 초박막 봉지기술   Park Sang-Hee  Electrochemical and Solid-State Letters, v.8, no.2, pp.21-23 149 원문
Journal 2004 Surface micromachined thermally driven micropump   Jang Won Ick  Sensors and Actuators A : Physical, v.115, no.1, pp.151-158 21 원문
Journal 1998 High-Quality Conformal Silicon Oxide Films Prepared by Multi-Step Sputtering PECVD and Chemical Mechanical Polishing   Min Park  Journal of Electronic Materials, v.27, no.11, pp.1262-1267 9 원문
특허 검색결과
Status Year Patent Name Country Family Pat. KIPRIS
No search results.
연구보고서 검색결과
Type Year Research Project Primary Investigator Download
No search results.