Subject

Subjects : Si film

  • Articles (20)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2014 The Fabrication of an Applicative Device for Trench Width and Depth Using Inductively Coupled Plasma and the Bulk Silicon Etching Process   Woo Jong Chang  Transactions on Electrical and Electronic Materials, v.15, no.1, pp.49-54 1 원문
Journal 2012 High Performance of Ultralow Temperature Polycrystalline Silicon Thin Film Transistor on Plastic Substrate   박동진  Solid-State Electronics, v.75, pp.97-101 2 원문
Journal 2011 Effect of Deposition Conditions and Crystallinity of Substrate on Phase Transition of Hydrogenated Si Films   김준관  Journal of the Electrochemical Society, v.158, no.7, pp.D430-D434 7 원문
Journal 2010 Fabrication of Self-Aligned TFTs with a Ultra-Low Temperature Polycrystalline Silicon Process on Metal Foils   Jaehyun Moon  Solid-State Electronics, v.54, no.11, pp.1326-1331 2 원문
Conference 2010 Photo Response of Amorphous Si Films Grown at Room Temperature using ICP CVD   Lim Jungwook  The Electrochemical Society (ECS) Meeting 2010 (218th), pp.1-1
Journal 2009 Evaluation of 1/f Noise Characteristics for Si-Based Infrared Detection Materials   Ryu Hojun  ETRI Journal, v.31, no.6, pp.703-708 3 원문
Journal 2009 Fabrication of N- and P-Channel Schottky Barrier Thin-Film Transistors Crystallized by Excimer Laser Annealing and Solid Phase Crystallization Methods   신진욱  Japanese Journal of Applied Physics, v.48, no.4, pp.1-4 0 원문
Conference 2008 Sputtered Silicon Antimony Thin Film for The Infrared Detection Layer of Microbolometer   Ryu Hojun  SENSORS 2008, pp.301-304 0 원문
Conference 2008 1/f Noise Characteristics of Sputtered Silicon Antimony Thin Film for Microbolometer   Ryu Hojun  Eurosensors 2008, pp.877-880
Journal 2008 A Two-Layer Stacked Polycrystalline Silicon Thin Film Transistor Complementary Metal Oxide Semiconductor Inverters Using Laser Crystallized Channel with High-k and Metal Gate on Si   Oh Soon-Young  Japanese Journal of Applied Physics, v.47, no.4, pp.3091-3094 7 원문
Journal 2008 Three-Dimensionally Stacked Poly-Si TFT CMOS Inverter with High Quality Laser Crystallized Channel on Si Substrate   Oh Soon-Young  Solid-State Electronics, v.52, no.3, pp.372-376 7 원문
Journal 2006 Performance Improvement of Ultralow Temperature Polycrystalline Silicon TFT on Plastic Substrate by Plasma Oxidation of Polycrystalline Si Surface   Kim Yong Hae  IEEE Electron Device Letters, v.27, no.11, pp.896-898 10 원문
Conference 2006 Plasma Oxidation Effect on Ultralow Temperature Polycrystalline Silicon TFT on Plastic Substrate   Kim Yong Hae  International Meeting on Information Display 2006, pp.1122-1125
Journal 2006 Planarization of Si Ridges in Sequential Lateral Solidification Process   Jaehyun Moon  Japanese Journal of Applied Physics, v.45, no.7, pp.5675-5680 2 원문
Conference 2006 Self-Aligned Thin Film Transistor Fabrication with an Ultra Low Temperature Polycrystalline Silicon Process on a Benzocyclobutene Planarized Stainless Steel Foil Substrate   Jaehyun Moon  Materials Research Society (MRS) Meeting 2006 (Spring), pp.1-6
Conference 2006 Crystallization of Poly-Si Film Using Triple-Layered Buffer Structure for Poly-Si TFT on Plastic Substrate   Lee Myung-Hee  한국 반도체 학술 대회 (KCS) 2006, pp.1-2
Journal 2005 Large-grain polycrystalline silicon film by sequential lateral solidification on a plastic substrate   Kim Yong Hae  Thin Solid Films, v.493, no.1-2, pp.192-196 19 원문
Conference 2005 Si Ridges in Laser Processing for TFT Fabrications: Formation and Planarization   Jaehyun Moon  MRS Meeting 2005 (Fall), pp.1-3
Journal 2004 고성능 저온 폴리실리콘 소자 특성   Kim Yong Hae  IEEE Electron Device Letters, v.25, no.8, pp.550-552 27 원문
Journal 2003 엑시머 레이저 에 의해 형성된 TFT 특성   Kim Yong Hae  Thin Solid Films, v.440, no.1-2, pp.169-173 12 원문
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