Subject

Subjects : Polycrystalline silicon (poly-Si)

  • Articles (33)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2013 Electrical Characteristics of Triple-Gate RSO Power MOSFET (TGRMOS) with Various Gate Configurations and Bias Conditions   Na Kyoung Il  ETRI Journal, v.35, no.3, pp.425-430 4 원문
Conference 2013 Simulation Studies of Triple Gate Trench Power MOSFETs (TGRMOSs) by Using Modified Resurf Stepped Oxide (RSO) Process with Various Gate Configuration and its Bias Condition   Na Kyoung Il  한국 반도체 학술 대회 (KCS) 2013, pp.1-2
Conference 2013 Sub-22 nm Silicon Template Nanofabrication by Advanced Spacer Patterning Technique for NIL Applications   Park Jong-Moon  Alternative Lithographic Technologies V (SPIE 8680), pp.1-8 0 원문
Journal 2012 High Performance of Ultralow Temperature Polycrystalline Silicon Thin Film Transistor on Plastic Substrate   박동진  Solid-State Electronics, v.75, pp.97-101 2 원문
Journal 2010 Fabrication of Self-Aligned TFTs with a Ultra-Low Temperature Polycrystalline Silicon Process on Metal Foils   Jaehyun Moon  Solid-State Electronics, v.54, no.11, pp.1326-1331 2 원문
Journal 2010 High-Performance Polycrystalline Silicon TFT on the Structure of a Dopant-Segregated Schottky-Barrier Source/Drain   Choi Sungjin  IEEE Electron Device Letters, v.31, no.3, pp.228-230 15 원문
Journal 2009 Fabrication of P-Type ZnO Thin Films Using Rf-Magnetron Sputter Deposition   Jun Kwan Kim  Electrochemical and Solid-State Letters, v.12, no.4, pp.H109-H112 15 원문
Journal 2009 Fabrication of N- and P-Channel Schottky Barrier Thin-Film Transistors Crystallized by Excimer Laser Annealing and Solid Phase Crystallization Methods   신진욱  Japanese Journal of Applied Physics, v.48, no.4, pp.1-4 0 원문
Journal 2009 Fabrication of n-type Schottky barrier thin-film transistor with channel length and width of 0.1 μm and erbium silicide source/drain   Yang Jong-Heon  Thin Solid Films, v.517, no.5, pp.1825-1828 5 원문
Journal 2008 Schottky Barrier N-Type Thin Film Transistors With Polycrystalline Silicon Channel and Er-Silicided Metallic Junctions   신진욱  IEEE Electron Device Letters, v.29, no.12, pp.1336-1339 4 원문
Journal 2008 Etching Characteristics of Al2O3 Thin Films in Inductively Coupled BCl3/Ar Plasma   Sun Jin Yun  Vacuum, v.82, no.11, pp.1198-1202 14 원문
Journal 2008 3.5-Inch QCIF AMOLED Panels with Ultra-low-Temperature Polycrystalline Silicon Thin Film Transistor on Plastic Substrate   Kim Yong Hae  ETRI Journal, v.30, no.2, pp.308-314 8 원문
Journal 2008 A Two-Layer Stacked Polycrystalline Silicon Thin Film Transistor Complementary Metal Oxide Semiconductor Inverters Using Laser Crystallized Channel with High-k and Metal Gate on Si   Oh Soon-Young  Japanese Journal of Applied Physics, v.47, no.4, pp.3091-3094 7 원문
Journal 2008 Three-Dimensionally Stacked Poly-Si TFT CMOS Inverter with High Quality Laser Crystallized Channel on Si Substrate   Oh Soon-Young  Solid-State Electronics, v.52, no.3, pp.372-376 7 원문
Journal 2007 Electrical Characteristics of Excimer-Laser-Annealed Poly-Si Thin-Film Transistors   이우현  Journal of the Korean Physical Society, v.51, pp.S241-S244
Journal 2007 Er and Pt Gate Electrodes Formed on SiO2 Gate Dielectrics   Choi Chel-Jong  Electrochemical and Solid-State Letters, v.11, no.2, pp.H22-H25 0 원문
Conference 2007 Fabrication of Two-Layer stacked Poly-Si TFT CMOS Inverters Using Laser Crystallized channel with metal gate on Si Substrate   Oh Soon-Young  International Conference on Solid State Devices and Materials (SSDM) 2007, pp.222-223
Journal 2006 Performance Improvement of Ultralow Temperature Polycrystalline Silicon TFT on Plastic Substrate by Plasma Oxidation of Polycrystalline Si Surface   Kim Yong Hae  IEEE Electron Device Letters, v.27, no.11, pp.896-898 10 원문
Conference 2006 Plasma Oxidation Effect on Ultralow Temperature Polycrystalline Silicon TFT on Plastic Substrate   Kim Yong Hae  International Meeting on Information Display 2006, pp.1122-1125
Journal 2006 Oxide-Silicon-Oxide Buffer Structure for Ultralow Temperature Polycrystalline Silicon Thin-Film Transistor on Plastic Substrate   Kim Yong Hae  IEEE Electron Device Letters, v.27, no.7, pp.579-581 22 원문
Conference 2006 High Performance of Polycrystalline Silicon TFT on Plastic Substrate Processed at Very Low Temperatures   Kim Yong Hae  International Symposium, Seminar and Exhibition (SID) 2006, pp.1-3
Journal 2006 Fabrication of Nano-Gap Electrode Pairs Using Atomic-Layer-Deposited Sacrificial Layer and Shadow Deposition   Park Chan Woo  Japanese Journal of Applied Physics, v.45, no.5A, pp.4293-4295 1 원문
Conference 2006 Defect Passivation of Ultralow Temperature Poly-Si Thin-Film Transistors   Choong-Heui Chung  MRS Meeting 2006 (Spring), pp.1-1
Journal 2006 Formation of a Self-Aligned Hard Mask using Hydrogen Silsesquioxane   Kiju Im  Applied Physics Letters, v.88, no.15, pp.1-3 3 원문
Conference 2006 Self-Aligned Thin Film Transistor Fabrication with an Ultra Low Temperature Polycrystalline Silicon Process on a Benzocyclobutene Planarized Stainless Steel Foil Substrate   Jaehyun Moon  Materials Research Society (MRS) Meeting 2006 (Spring), pp.1-6
Journal 2006 Plasma-free hydrogenation of ultralow-temperature polycrystalline silicon thin-film transistors with SiNx:H as interlayer dielectric   Choong-Heui Chung  Applied Physics Letters, v.88, no.7, pp.1-15 6 원문
Conference 2006 Crystallization of Poly-Si Film Using Triple-Layered Buffer Structure for Poly-Si TFT on Plastic Substrate   Lee Myung-Hee  한국 반도체 학술 대회 (KCS) 2006, pp.1-2
Conference 2006 Buffer Structure for Protecting Laser Damage of Plastic Substrate in Ultra Low Temperature Polycrystalline Silicon thin Film Transistor Process   Kim Yong Hae  한국 반도체 학술 대회 (KCS) 2006, pp.1-3
Conference 2006 Plasma-Free Defect Passivation of Ultra Low Temperature Poly-Si Thin Film Transistors   Choong-Heui Chung  한국반도체 학술 대회 (KCS) 2006, pp.1-2
Conference 2005 Fabrication of High Performance Low Temperature Poly-Si(LTPS) on Flexible Metal Foil   Park Dong Jin  International Display Workshops in Conjunction with Asia Display (IDW/AD) 2005, pp.1-4
Journal 2005 Large-grain polycrystalline silicon film by sequential lateral solidification on a plastic substrate   Kim Yong Hae  Thin Solid Films, v.493, no.1-2, pp.192-196 19 원문
Journal 2004 고성능 저온 폴리실리콘 소자 특성   Kim Yong Hae  IEEE Electron Device Letters, v.25, no.8, pp.550-552 27 원문
Journal 2003 엑시머 레이저 에 의해 형성된 TFT 특성   Kim Yong Hae  Thin Solid Films, v.440, no.1-2, pp.169-173 12 원문
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