Subject

Subjects : Silicon Nitride

  • Articles (46)
  • Patents (1)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2025 Large‐area stretchable oxide thin‐film transistor arrays with sandwiched molybdenum in serpentine structure   Jeho Na  ETRI Journal, v.47, no.1, pp.134-143 0 원문
Conference 2024 Silicon Nitride Based Planar Lightwave Circuits for Coherent Optics   Jong-Hoi Kim  Advanced Photonics Congress 2024, pp.1-2 0
Journal 2022 Controlled-NOT operation of SiN-photonic circuit using photon pairs from silicon-photonic circuit   Lee Jong-Moo  Optics Communications, v.509, pp.1-5 13 원문
Journal 2022 Luminance Enhancement of Top-emitting Blue Organic Light Emitting Diodes Encapsulated with Silicon Nitride Thin Films by a Double-layer Nano-structure   Cho Doo-Hee  Optics Express, v.30, no.7, pp.11959-11972 5 원문
Conference 2020 Low-loss, Low-crosstalk Silicon Nitirde Array Waveguide Grating using Multimode Waveguide at 850nm   Park Jaegyu  IEEE Photonics Conference (IPC) 2020, pp.1-2 0 원문
Journal 2020 The Formation of An Optically Functional Nano-lens Array by Substrate Surface Treatment   Park Young Sam  Journal of Materials Science : Materials in Electronics, v.31, no.3, pp.2331-2336 1 원문
Journal 2019 Low-Crosstalk Silicon Nitride Arrayed Waveguide Grating for the 800-nm Band   Park Jaegyu  IEEE Photonics Technology Letters, v.31, no.14, pp.1183-1186 15 원문
Journal 2018 Cost-Effective 2 × 2 Silicon Nitride Mach-Zehnder Interferometric (MZI) Thermo-Optic Switch   Jiho Joo  IEEE Photonics Technology Letters, v.30, no.8, pp.740-743 34 원문
Journal 2018 High Performance SONOS Flash Memory with In-Situ Silicon Nanocrystals Embedded in Silicon Nitride Charge Trapping Layer   임재갑  Solid-State Electronics, v.140, pp.134-138 13 원문
Conference 2017 MEMS Capacitive Microphone with Dual-Anchored Membrane   Chang Han Je  Eurosensors 2017, pp.1-5 원문
Journal 2017 Attogram Mass Sensing based on Silicon Microbeam Resonators   Baek In Bok  Scientific Reports, v.7, pp.1-10 26 원문
Journal 2016 Effect of Fluoride-based Plasma Treatment on the Performance of AlGaN/GaN MISFET   Hokyun Ahn  ETRI Journal, v.38, no.4, pp.675-684 5 원문
Conference 2016 Influence of Silicon Nitride Layer on MIM Capacitor for MMIC   Shin Min Jeong  International Symposium on the Physics of Semiconductors and Applications (ISPSA) 2016, pp.1-1
Journal 2014 The Control of Oscillation Mode in Silicon Microbeams Using Silicon Nitride Anchor   Baek In Bok  Applied Physics Letters, v.105, no.10, pp.1-5 2 원문
Journal 2014 Pore-Size Reduction Protocol for SiN Membrane Nanopore Using the Thermal Reflow in Nanoimprinting for Nanobio-Based Sensing   Dae-Sik Lee  Journal of Biomedical Optics, v.19, no.5, pp.1-6 5 원문
Journal 2013 Fabrication of Enhancement-Mode AlGaN/GaN High Electron Mobility Transistors Using Double Plasma Treatment   Jong-Won Lim  Thin Solid Films, v.547, pp.106-110 10 원문
Journal 2013 Transparent Non-Volatile Memory Device Using Silicon Quantum Dots   Rae-Man Park  Electronic Materials Letters, v.9, no.4, pp.467-469 6 원문
Journal 2012 Simulation and Fabrication Studies of Semi-SuperJunction Trench Power MOSFETs by RSO Process with Silicon Nitride Layer   Na Kyoung Il  ETRI Journal, v.34, no.6, pp.962-965 16 원문
Conference 2012 Membrane Sieve Using Stoichiometric and Stress-Reduced SiN/SiO/SiN Multilayer Films and Applications to Plasma Separation   Dae-Sik Lee  SENSORS 2012, pp.1-4 2 원문
Conference 2011 Micro/Nano Fabrication of Nanopores Formed Through SiN   Dae-Sik Lee  Eurosensors 2011, pp.884-887 2 원문
Journal 2011 Microfabrication of SiN Membrane Nanosieve Using Anisotropic Reactive Ion Etching (ARIE) with an Ar/CF4 Gas Flow   Dae-Sik Lee  Journal of Nanoscience and Nanotechnology, v.11, no.5, pp.4511-4516 8 원문
Journal 2011 Population Inversion and Low Cooperative Upconversion in Er-doped Silicon-rich Silicon Nitride Waveguide   장지수  Optics Express, v.19, no.9, pp.8406-8412 11 원문
Journal 2011 Effects of the Hole Tunneling Barrier Width on the Electrical Characteristic in Silicon Quantum Dots Light-Emitting Diodes   Tae-Youb Kim  Japanese Journal of Applied Physics, v.50, no.4 PART 2, pp.1-3 4 원문
Journal 2010 Fabrication of a Nanosize Pattern Embedded Plastic Chip via an Injection Molding Method for Application to an Optical Biosensor   Kim Kyung Hyun  International Polymer Processing, v.25, no.5, pp.341-345 2 원문
Journal 2010 Label-free optical biosensing using a horizontal air-slot SiN_x microdisk resonator   이신영  Optics Express, v.18, no.20, pp.20638-20644 63 원문
Journal 2010 Sub-50 nm Template Fabrications for Nanoimprint Lithography Using Hydrogen Silsesquioxane and Silicon Nitride   Shim Jae Yeob  Journal of Nanoscience and Nanotechnology, v.10, no.5, pp.3628-3630 4 원문
Journal 2010 A silicon nitride microdisk resonator with a
40-nm-thin horizontal air slot   이신영  Optics Express, v.18, no.11, pp.11209-11215 38 원문
Journal 2009 On-chip, Planar Integration of Er Doped Silicon-rich Silicon Nitride Microdisk with SU-8 Waveguide with Sub-micron Gap Control   Jang Ji Su  Optics Express, v.17, no.25, pp.22918-22924 23 원문
Conference 2009 Micro Membrane Filters for Passive Plasma Extraction From Whole Human Blood Using Silicon Nitride-based Microfilters and Plama Collection Using Agarose Gels   Dae-Sik Lee  EuroSensors 2009, pp.1511-1514 2 원문
Journal 2008 Fabrication of an Integrated Microfluidic Device Based on a Heat-sensitive Poly(N-isopropylacrylamide) Polymer and Micromachining Protocols for Programmed Bio-molecular Patterning   Dae-Sik Lee  Sensors and Actuators B : Chemical, v.130, no.1, pp.150-157 18 원문
Journal 2007 A Temperature-Controllable Microelectrode and Its Application to Protein Immobilization   Dae-Sik Lee  ETRI Journal, v.29, no.5, pp.667-669 9 원문
Journal 2007 Development of a MEMS Structure for an Infrared Focal Plane Array   Seong-Mok Cho  전기학회논문지, v.56, no.8, pp.1461-1465
Conference 2007 Er Doped Silicon-rich-silicon Nitride(SRSN) Microdisk   장지수  Conference on Lasers and Electro-Optics/Pacific Rim (CLEO/PR) 2007, pp.1-2 0 원문
Conference 2007 The Formation of Silicon Quantum Dots in Silicon Nitride Film based on the Gas Mixture of SiH4/N2 AND SiH4/NH3   Tae-Youb Kim  International Conference on Surfaces, Coatings and Nanostructured Materials (NanoSMat) 2007, pp.322-323
Journal 2007 Characteristics of Self-aligned InP/InGaAs Heterojunction Bipolar Transistor Assisted by Silicon Nitride Sidewall   Min Byoung-Gue  Solid State Phenomena, v.124-126, pp.97-100 원문
Journal 2007 Patterning of Parallel Nanobridge Structures by Reverse Nanostencil Lithography using an Edge-patterned Stencil   Park Chan Woo  Nanotechnology, v.18, no.4, pp.1-5 8 원문
Journal 2006 Physics and Device Structures of Highly Efficient Silicon Quantum Dots Based Silicon Nitride Light-Emitting Diodes   Gun Yong Sung  IEEE Journal of Selected Topics in Quantum Electronics, v.12, no.6, pp.1545-1555 51 원문
Conference 2006 Nanocrystal Silicon Light Emitting Devices   Gun Yong Sung  Passive Components and Fiber-based Devices III (APOC) 2006 (SPIE 6352), v.6352, pp.1-13 0 원문
Conference 2006 Characteristics of Self-Aligned InP/InGaAs Heterojunction Bipolar Transistor Assisted by Silicon Nitride Sidewall   Min Byoung-Gue  IUMRS International Conference in Asia (IUMRS-ICA) 2006, pp.97-100
Journal 2006 Ni/Au Contact to Silicon Quantum Dot Light-Emitting Diodes for the Enhancement of Carrier Injection and Light Extraction Efficiency   김백현  Applied Physics Letters, v.89, no.6, pp.1-3 41 원문
Journal 2006 Comparative Study of DC and Microwave Characteristics of 0.12 µm Double-Recessed Gate AlGaAs/InGaAs/GaAs Pseudomorphic High-Electron-Mobility Transistors Using Dielectric-Assisted Process   Jong-Won Lim  Japanese Journal of Applied Physics, v.45, no.4B, pp.3358-3363 0 원문
Journal 2006 Effects of Ag/Indium Tin Oxide Contact to a SiC Doping Layer on Performance of Si Nanocrystal Light-Emitting Diodes   Huh Chul  Applied Physics Letters, v.88, no.13, pp.1-3 16 원문
Conference 2006 Effects of Ag/ITO Current Spreading Contact to a SiC Doping Layer on Performance of Si Quantum Dot Light-Emitting Diodes   Huh Chul  한국반도체 학술 대회 (KCS) 2006, pp.1-2
Journal 2003 Micromachined piezoelectric membrane acoustic device   Sang Choon Ko  Sensors and Actuators A : Physical, v.103, no.1-2, pp.130-134 189 원문
Conference 2002 The Effects of Plasma Induced Damage on The Channel Layers of Ion Implanted GaAs MESFETs during Reactive Ion Etching(RIE) and Plasma Ashing Processes   Hokyun Ahn  Materials Research Society (MRS) Meeting 2002 (Spring), v.720, pp.67-72 1 원문
Conference 2002 Piezoelectric membrane acoustic devices   Sang Choon Ko  International Conference on Micro Electro Mechanical Systems (MEMS) 2002, pp.296-299 18 원문
특허 검색결과
Status Year Patent Name Country Family Pat. KIPRIS
Registered 2009 SILICON NITRIDE LAYER FOR LIGHT EMITTING DEVICE, LIGHT EMITTING DEVICE USING THE SAME, AND M UNITED STATES
연구보고서 검색결과
Type Year Research Project Primary Investigator Download
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