Subject

Subjects : Etching process

  • Articles (49)
  • Patents (2)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2024 Fabrication of low-loss symmetrical rib waveguides based on x-cut lithium niobate on insulator for integrated quantum photonics   Hong-Seok Kim  ETRI Journal, v.46, no.5, pp.783-792 1 원문
Conference 2024 GaAs mHEMT Technology Achieving a High Cut-off Frequncy of 446 GHz with a Gate Length of 75 nm   Park Jongyul  International Conference on Information and Communication Technology Convergence (ICTC) 2024, pp.1468-1469 0 원문
Journal 2023 Wide-wavelength–tunable distributed Bragg reflector laser diode with high thermal efficiency   Chul-Wook Lee  Optics Express, v.31, no.20, pp.32126-32133 1 원문
Journal 2023 Light field microscope target with low power, low pressure reactive ion etching process   Kim Chihoon  Current Applied Physics, v.50, pp.127-132 1 원문
Journal 2023 Analysis of issues in gate recess etching in the InAlAs/InGaAs HEMT manufacturing process   Min Byoung-Gue  ETRI Journal, v.45, no.1, pp.171-179 4 원문
Journal 2020 Effects of Recess Depth Under the Gate Area on the V th-Shift for Fabricating Normally-Off Field Effect Transistors on AlGaN/GaN Heterostructures   Kim Zin-Sig  Journal of Nanoscience and Nanotechnology, v.20, no.7, pp.4170-4175 원문
Conference 2019 Normally-off Field Effect Transistors using fine controlled Recess under Gate Area on AlGaN/GaN Heterostructures   Kim Zin-Sig  대한전자공학회 학술 대회 (추계) 2019, pp.215-218
Journal 2019 Origin of the Dry Etch Damage in the Short-channel Oxide Thin-film Transistors for High Resolution Display Application   Ji Hun Choi  Thin Solid Films, v.674, pp.71-75 7 원문
Journal 2017 Large Size of Capacitive Window-Unified TSP Using by Contact Hole Type as an Insulator   Seo Woo Hyung  Journal of Nanoscience and Nanotechnology, v.17, no.5, pp.3089-3091 0 원문
Journal 2017 Flexible Transparent Displays Based on Core/Shell Upconversion Nanophosphor-incorporated Polymer Waveguides   홍아라  Scientific Reports, v.7, pp.1-11 34 원문
Journal 2017 Flexible Transparent Displays Based on Core/Shell Upconversion Nanophosphor-incorporated Polymer Waveguides   Bong Je Park  Scientific Reports, v.7, pp.1-11 34 원문
Journal 2016 Effect of Fluoride-based Plasma Treatment on the Performance of AlGaN/GaN MISFET   Hokyun Ahn  ETRI Journal, v.38, no.4, pp.675-684 5 원문
Journal 2015 The Effects of Electrodes Patterned onto the Piezoelectric Thin Film on Frequency Response Characteristics of PMN-PT MEMS Acoustic Actuators   Hye Jin Kim  Journal of Electroceramics, v.35, no.1, pp.45-52 10 원문
Journal 2015 Al2O3 Surface Passivation and MOS-Gate Fabrication on AlGaN/GaN High-Electron-Mobility Transistors without Al2O3 Etching Process   Kim Jeong-Jin  Japanese Journal of Applied Physics, v.54, no.3, pp.1-3 1 원문
Journal 2014 The Fabrication of an Applicative Device for Trench Width and Depth Using Inductively Coupled Plasma and the Bulk Silicon Etching Process   Woo Jong Chang  Transactions on Electrical and Electronic Materials, v.15, no.1, pp.49-54 1 원문
Journal 2013 A Flexible Metamaterial with Negative Refractive Index at Visible Wavelength   최무한  Current Applied Physics, v.13, no.8, pp.1723-1727 24 원문
Journal 2013 Micromachined stress-free TSV hole for AlGaN/GaN-on-Si (1 1 1) platform-based devices   Sang Choon Ko  Journal of Micromechanics and Microengineering, v.23, no.3, pp.1-7 3 원문
Journal 2012 Simplifying Patterning Process of ZnO Nanowires by One Step Development and Etching Process   Kim Yong Hee  Journal of Sol-Gel Science and Technology, v.64, no.2, pp.304-308 3 원문
Journal 2012 Etching Characteristics and Mechanisms of TiO2 Thin Films in HBr/Cl 2/Ar Inductively Coupled Plasma   김대희  Japanese Journal of Applied Physics, v.51, no.10, pp.1-5 3 원문
Conference 2012 Dual-Focus Dual-Layered Microlens Array   Lee Jong-Moo  Opto-Electronics and Communications Conference (OECC) 2012, pp.889-890 1 원문
Journal 2012 Variation in the Electrical Properties of 100 V/100 a Rated Mesh and Stripe TDMOSFETs (Trench Double-Diffused MOSFETs) for Motor Drive Applications   Na Kyoung Il  Journal of the Korean Physical Society, v.60, no.10, pp.1508-1512 0 원문
Journal 2012 Etching Characteristics and Mechanisms of TiO2 Thin Films in HBr/Ar and Cl2/Ar Inductively-Coupled Plasmas   장한별  Plasma Chemistry and Plasma Processing, v.32, no.2, pp.333-342 3 원문
Conference 2011 Highly Efficient Organic Light Emitting Diodes with NanoStructured Substrate   Shin Jin Wook  International Meeting on Information Display (IMIT) 2011, pp.1-2
Conference 2011 The Novel Sensitivity Improved Surface Micromachined MEMS Microphone with the Center-Hole Membrane   Chang Han Je  Eurosensors 2011, pp.583-586 7 원문
Journal 2011 Dual Etch Processes of Via and Metal Paste Filling for Through Silicon Via Process   함용현  Thin Solid Films, v.519, no.20, pp.6727-6731 26 원문
Journal 2011 Effect of Deposition Conditions and Crystallinity of Substrate on Phase Transition of Hydrogenated Si Films   김준관  Journal of the Electrochemical Society, v.158, no.7, pp.D430-D434 7 원문
Journal 2009 Process development of ITO source/drain electrode for the top-gate indium–gallium–zinc oxide transparent thin-film transistor   Cheong Woo-Seok  Thin Solid Films, v.517, no.14, pp.4094-4099 23 원문
Journal 2009 High-Mobility Transparent SnO2 and ZnO-SnO2 Thin-Film Transistors with SiO2/Al2O3 Gate Insulators   Cheong Woo-Seok  Japanese Journal of Applied Physics, v.48, no.4, pp.1-15 16 원문
Conference 2008 Dry Etching Process for the Fabrication of Transparent InGaZnO TFTs   Yoon Sung Min  International Meeting on Information Display (IMID) 2008, pp.222-225 0
Conference 2008 Highly Conductive and Transparent Electrodes for the Application of AM-OLED Display   Ryu Min Ki  International Meeting on Information Display (IMID) 2008, pp.813-815 1
Journal 2008 Nonuniform Output Characteristics of Laser Diode with Wet-etched Spot-size Converter   Choe Joong-Seon  Optics Express, v.16, no.8, pp.5790-5796 2 원문
Journal 2007 Fabrication of Oxide TFTs with Al2O3/ZnO Gate Stacks Patterned Using a Dry Etching Method   Yoon Sung Min  Electrochemical and Solid-State Letters, v.11, no.2, pp.J15-J18 9 원문
Journal 2007 Transparent ZnO-TFT Arrays Fabricated by Atomic Layer Deposition   Park Sang-Hee  Electrochemical and Solid-State Letters, v.11, no.1, pp.H10-H14 104 원문
Conference 2007 Novel Process for the Electrodes of Microbolometer   Ryu Hojun  International Conference on Sensor Technologies and Applications (SENSORCOMM) 2007, pp.10-13 1 원문
Journal 2007 Temperature-Dependent Dielectric Properties for (Ba,Sr)TiO3 Graded Thin Films on MgO (001) Substrate Grown by Pulsed Laser Deposition   Moon Seungeon  Journal of the Korean Physical Society, v.51, pp.S166-S169 1
Journal 2007 Patterning of Parallel Nanobridge Structures by Reverse Nanostencil Lithography using an Edge-patterned Stencil   Park Chan Woo  Nanotechnology, v.18, no.4, pp.1-5 8 원문
Journal 2006 Dry Etching of Ge2Sb2Te5 Thin Films into Nanosized Patterns Using TiN Hard Mask   Yoon Sung Min  Japanese Journal of Applied Physics, v.45, no.40, pp.1080-1083 21 원문
Conference 2006 Electrical Characterization of Semiconducting Nanowire and Its Application to a Chemical Sensor   Kang-Ho Park  The Electrochemical Society (ECS) Meeting 2006, pp.231-237 0 원문
Conference 2006 Index Modulation Type Waveguides Written by Laser Direct Writing Technology   Lee Woo Jin  Passive Components and Fiber-based Devices III (APOC) 2006 (SPIE 6351), v.6351, pp.1-6 0 원문
Conference 2006 Semiconducting Nanowire Device Characterization for a Chemical Sensor   Park Jonghyurk  International Meeting on Chemical Sensors (IMCS) 2006, pp.1-2
Journal 2006 Formation of a Self-Aligned Hard Mask using Hydrogen Silsesquioxane   Kiju Im  Applied Physics Letters, v.88, no.15, pp.1-3 3 원문
Conference 2005 A Novel Method to Fabricate Recessed SiGe Source/Drain using a selective Si and SiGe Epitaxial Growth without Etching Process   Kim Sang Hoon  MRS Meeting 2005 (Fall), pp.1-2
Journal 2005 Etching Characteristics of Ge2Sb2Te5 Using High-Density Helicon Plasma for the Nonvolatile Phase-Change Memory Applications   Yoon Sung Min  Japanese Journal of Applied Physics, v.44, no.24-27, pp.L869-L872 36 원문
Conference 2005 EBL Patterning of Sub-10 nm Line Using HSQ with Plasma Etching Process and Fabricating of Triple-Gate MOS Transistors with 6 nm Gate Length   Baek In Bok  Silicon Nanoelectronics Workshop (SNW) 2005, pp.16-17
Journal 2003 Fabrication of wavelength-tunable butt-coupled sampled grating DBR lasers using planar buried heterostructure   Oh Su Hwan  IEEE Photonics Technology Letters, v.15, no.12, pp.1680-1682 16 원문
Journal 2003 The design and the fabrication of monolithically integrated GaInAsP MQW laser with butt-coupled waveguide   Oh Su Hwan  IEEE Photonics Technology Letters, v.15, no.10, pp.1339-1341 27 원문
Journal 2002 Active-Matrix Field Emission Display with Amorphous Silicon Thin-Film Transistors and Mo-Tip Field Emitter Arrays   Yoon-Ho Song  ETRI Journal, v.24, no.4, pp.290-298 26 원문
Journal 2002 액티브-매트릭스 캐소드를 위한 비정질 실리콘 박막 트랜지스터와 Mo-팁의 집적화 및 특성 분석   Kim Do-Hyung  IEEE Transactions on Electron Devices, v.49, no.7, pp.1136-1142 3 원문
Journal 2002 Characterization of Via Etching in CHF3/CF4 Magnetically Enhanced Reactive Ion Etching Using Neural Networks   Kwon Sung-Ku  ETRI Journal, v.24, no.3, pp.211-220 10 원문
특허 검색결과
Status Year Patent Name Country Family Pat. KIPRIS
Registered 2006 METHOD OF FABRICATING T-GATE UNITED STATES
Registered 2007 Long Wavelength Vertical Cavity Surface Emitting Laser and Method for Fabricating the Same UNITED STATES
연구보고서 검색결과
Type Year Research Project Primary Investigator Download
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