Subject

Subjects : Plasma-enhanced atomic layer deposition

  • Articles (39)
  • Patents (0)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2022 Characteristics of PEALD–Hafnium Dioxide Films and their Application to Gate Insulator Stacks of Photosynaptic Transistors   Kim Jieun  Advanced Electronic Materials, v.8, no.4, pp.1-8 6 원문
Journal 2021 Organic/Inorganic Hybrid Thin-Film Encapsulation Using Inkjet Printing and PEALD for Industrial Large-Area Process Suitability and Flexible OLED Application   Kwon Byoung-Hwa  ACS Applied Materials & Interfaces, v.13, no.46, pp.54621-55766 36 원문
Journal 2021 Effects of Moisture-Proof Back Passivation Layers of Al2O3 and AlxTi1-xOy Films on Efficiency Improvement and Color Modulation in Transparent a-Si:H Solar Cells   Kim Jieun  ACS Applied Materials & Interfaces, v.13, no.4, pp.4968-4974 13 원문
Journal 2019 All-oxide Thin-film Transistors with Channels of Mixed InOx-ZnOy Formed by Plasma-enhanced Atomic Layer Deposition Process   Lee Jeongmu  Journal of Vacuum Science and Technology A, v.37, no.6, pp.1-7 11 원문
Journal 2016 Improved stability of electrical properties of nitrogen-added Al 2 O 3 films grown by PEALD as gate dielectric   Lee Da Jung  Materials Research Bulletin, v.83, pp.597-602 10 원문
Conference 2016 Oxide Vertical TFTs for the Application to the Ultra High Resolution Display   염혜인  Society for Information Display (SID) International Symposium 2016, pp.820-822 34 원문
Conference 2015 The Effect of Annealing Treatment on Indium Oxide/Zinc Oxide Heterostructured Thin Films Transistors Grown by Plasma Enhanced Atomic Layer Deposition   Lee Hwanjae  International Conference on Advanced Materials and Devices (ICAMD) 2015, pp.1-1
Conference 2015 A Study on the Physical and Electrical Properties of Indium Oxide/Zinc Oxide Heterostructured Thin Films Deposited by Plasma Enhanced Atomic Layer Deposition   Lee Jeongmu  International Conference on Advanced Materials and Devices (ICAMD) 2015, pp.1-1
Conference 2015 The Effect of Post-Annealing on Bias Stability of InOx/ZnO Superlattice Thin Film Transistors Grown by Plasma Enhanced Atomic Layer Deposition   Lee Hwanjae  Asian-European International Conference on Plasma Surface Engineering (AEPSE) 2015, pp.1-1
Conference 2015 Growth Characteristics and Electrical Properties of Indium Oxide and Zinc Oxide Superlattice Thin Films by Plasma Enhanced Atomic Layer Deposition   Lee Jeongmu  Asian-European International Conference on Plasma Surface Engineering (AEPSE) 2015, pp.1-1
Journal 2010 Fabrication of Self-Aligned TFTs with a Ultra-Low Temperature Polycrystalline Silicon Process on Metal Foils   Jaehyun Moon  Solid-State Electronics, v.54, no.11, pp.1326-1331 2 원문
Journal 2010 A Low-Temperature-Grown TiO2-Based Device for the Flexible Stacked RRAM Application   Hu Young Jeong  Nanotechnology, v.21, no.11, pp.1-6 132 원문
Journal 2010 Optical and Electrical Properties of AlxTi1-xO Films   Lim Jungwook  Journal of the Korean Physical Society, v.56, no.1, pp.96-99 3 원문
Journal 2010 Bipolar Resistive Switching in Amorphous Titanium Oxide Thin Film   Hu Young Jeong  Physica Status Solidi (RRL), v.4, no.1-2, pp.1-3 60 원문
Conference 2009 Electrical and Optical Properties of AlTiO Films   Lim Jungwook  한국반도체 학술 대회 (KCS) 2009, pp.1-2
Journal 2008 Optical AlxTi1-xOy Films Grown by Plasma Enhanced Atomic Layer Deposition   Lim Jungwook  Japanese Journal of Applied Physics, v.47, no.8, pp.6934-6937 10 원문
Journal 2008 Vanadium Dioxide Films Deposited on Amorphous SiO2- and Al2O3-Coated Si Substrates by Reactive RF-Magnetron Sputter Deposition   Sun Jin Yun  Japanese Journal of Applied Physics, v.47, no.4, pp.3067-3069 22 원문
Journal 2007 Characteristics of Al[sub x]Ti[sub 1−x]O[sub y] Films Grown by Plasma-Enhanced Atomic Layer Deposition   Lim Jungwook  Journal of the Electrochemical Society, v.154, no.11, pp.G239-G243 25 원문
Journal 2007 PEALD 방법으로 증착한 ZrO2/Al2O3 nano-compoiste 박막의 특성   Sun Jin Yun  Journal of Nanoscience and Nanotechnology, v.7, no.11, pp.4180-4184
Journal 2007 Characteristics of Pentacene Thin Film Transistor with Al2O3 Gate Dielectrics on Plastic Substrate   Lim Jungwook  Electrochemical and Solid-State Letters, v.10, no.10, pp.J36-J38 8 원문
Journal 2007 Stress Reduction of Ge2Sb2Te5 Crystallization by Capping Al2O3 Film Grown by PEALD   Park Young Sam  ECS Transactions, v.11, no.7, pp.245-248 2 원문
Conference 2007 P‐18: Improvement of Stability in ZnO TFT Under Bias Stress   Hwang Chi-Sun  Society for Information Display (SID) International Symposium 2007, pp.237-240 6 원문
Journal 2007 Pentacene-Thin Film Transistors with ZrO2 Gate Dielectric Layers Deposited by Plasma-Enhanced Atomic Layer Deposition   Sun Jin Yun  Electrochemical and Solid-State Letters, v.10, no.3, pp.H90-H93 11 원문
Conference 2006 High-K Nano-Composite ZrO2/Al2O3 Films Deposited by Plasma-Enhanced Atomic Layer Deposition   Sun Jin Yun  International Conference on Nano Science and Nano Technology (GJ-NST) 2009, pp.1-25
Journal 2006 Performance Improvement of Ultralow Temperature Polycrystalline Silicon TFT on Plastic Substrate by Plasma Oxidation of Polycrystalline Si Surface   Kim Yong Hae  IEEE Electron Device Letters, v.27, no.11, pp.896-898 10 원문
Conference 2006 Characteristics of ZrAlO Films Deposited by Plasma Enhanced Atomic Layer Deposition   Sun Jin Yun  The Electrochemical Society (ECS) Meeting 2006, pp.1-2
Conference 2006 Transparent ZnO Transistor Array by Means of Plasma Enhanced Atomic Layer Deposition   Park Sang-Hee  International Meeting on Information Display 2006, pp.601-604
Conference 2006 Plasma Oxidation Effect on Ultralow Temperature Polycrystalline Silicon TFT on Plastic Substrate   Kim Yong Hae  International Meeting on Information Display 2006, pp.1122-1125
Conference 2006 Plasma Enhanced Atomic Layer Deposition of Vanadium Oxide using Tetrakis(Ethylmethylamino) Vanadium and O2 as Precursors   Sun Jin Yun  International Conference on Atomic Layer Deposition Workshop (ALD) 2006, pp.1-1
Conference 2006 Plasma-Enhanced Atomic Layer Deposition of ZrO2 film and the Performance of Pentacene thin film Transistor with ZrO2 Gate Dielectric Layer   Sun Jin Yun  International Conference on Atomic Layer Deposition Workshop (ALD) 2006, pp.1-1
Conference 2006 Switching Mechanism of TiO2 thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition   Ryu Min Ki  MRS Meeting 2006 (Spring), pp.1-1
Conference 2006 Self-Aligned Thin Film Transistor Fabrication with an Ultra Low Temperature Polycrystalline Silicon Process on a Benzocyclobutene Planarized Stainless Steel Foil Substrate   Jaehyun Moon  Materials Research Society (MRS) Meeting 2006 (Spring), pp.1-6
Conference 2006 Plasma-Enhanced Atomic Layer Deposition 기술을 이용한 ZrOB 2B 박막 증착 공정에서 증착 온도와 Plasma Pulse Width가 박막 특성에 미치는 효과   Sun Jin Yun  한국반도체 학술 대회 (KCS) 2006, pp.1-2
Journal 2006 Electrical Properties of Aluminum Silicate Films Grown by Plasma Enhanced Atomic Layer Deposition   Lim Jungwook  Electrochemical and Solid-State Letters, v.9, no.1, pp.F8-F11 9 원문
Journal 2005 Effect of Plasma on Characteristics of Zirconium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition   Sun Jin Yun  Electrochemical and Solid-State Letters, v.8, no.11, pp.F47-F50 27 원문
Conference 2005 Characteristics of ZnO Thin Films by Means of Plasma Enhanced Atomic Layer Deposition   Park Sang-Hee  ECS Transactions, pp.125-130 2 원문
Journal 2005 Characteristics of Aluminum Silicate Films Grown by Plasma-Enhanced Atomic Layer Deposition   Lim Jungwook  Electrochemical and Solid-State Letters, v.8, no.9, pp.F25-F28 16 원문
Journal 2005 Low-Temperature Growth of SiO2 Films by Plasma-Enhanced Atomic Layer Deposition   Lim Jungwook  ETRI Journal, v.27, no.1, pp.118-121 68 원문
Journal 2004 고성능 저온 폴리실리콘 소자 특성   Kim Yong Hae  IEEE Electron Device Letters, v.25, no.8, pp.550-552 27 원문
특허 검색결과
Status Year Patent Name Country Family Pat. KIPRIS
No search results.
연구보고서 검색결과
Type Year Research Project Primary Investigator Download
No search results.