Subject

Subjects : Micro-electro-mechanical system (MEMS)

  • Articles (44)
  • Patents (6)
  • R&D Reports (0)
논문 검색결과
Type Year Title Cited Download
Journal 2024 High-precision and low-noise dielectric tensor tomography using a micro-electromechanical system mirror   Chae Byung Gyu  Optics Express, v.32, no.13, pp.23171-23179 2 원문
Journal 2024 High-precision and low-noise dielectric tensor tomography using a micro-electromechanical system mirror   이주헌  Optics Express, v.32, no.13, pp.23171-23179 2 원문
Journal 2020 A Novel Experimental Approach to the Applicability of High-Sensitivity Giant Magneto-Impedance Sensors in Magnetic Field Communication   Kim Jang Yeol  IEEE Access, v.8, pp.193091-193101 14 원문
Journal 2019 Screen-Based Sports Simulation Using Acoustic Source Localization   Seo Sang Woo  Applied Sciences, v.9, no.15, pp.1-15 14 원문
Conference 2018 Efficient Sound-source Localization Method based on Direction Estimation using 2D Microphone Array   Seo Sang Woo  International Conference on Information Technology (ICIT) 2018, pp.301-306 0 원문
Journal 2018 Optical and Acoustic Sensor-Based 3D Ball Motion Estimation for Ball Sport Simulators †   Seo Sang Woo  Sensors, v.18, no.5, pp.1-13 5 원문
Conference 2017 Estimation of 3D Ball Motion using an Infrared and Acoustic Vector Sensor   Seo Sang Woo  International Conference on Information and Communication Technology Convergence (ICTC) 2017, pp.1048-1050 2 원문
Journal 2017 MEMS-Based NO2 Gas Sensor Using ZnO Nano-Rods for Low-Power IoT Application   Jaewoo Lee  Journal of the Korean Physical Society, v.70, no.10, pp.924-928 18 원문
Conference 2016 Application of Vanadium Redox Flow Battery to Grid Connected Microgrid Energy Management   Jongwoo Choi  International Conference on Renewable Energy Research and Applications (ICRERA) 2016, pp.903-906 14 원문
Journal 2016 Low-Noise MEMS Microphone Readout Integrated Circuit Using Positive Feedback Signal Amplification   Kim Yi-Gyeong  ETRI Journal, v.38, no.2, pp.235-243 5 원문
Journal 2015 A Concave-Patterned TiN/PECVD-Si3N4 /TiN Diaphragm MEMS Acoustic Sensor Based on a Polyimide Sacrificial Layer   Jaewoo Lee  Journal of Micromechanics and Microengineering, v.25, no.12, pp.1-13 8 원문
Journal 2015 The Effects of Electrodes Patterned onto the Piezoelectric Thin Film on Frequency Response Characteristics of PMN-PT MEMS Acoustic Actuators   Hye Jin Kim  Journal of Electroceramics, v.35, no.1, pp.45-52 10 원문
Journal 2015 MEMS Pressure Sensor Technology and Industry Trends   Chang Han Je  전자통신동향분석, v.30, no.6, pp.21-30 원문
Conference 2015 Focus Tunable MEMS Deformable Convex Mirror Based on Electromagnetic Actuation   Md. Mahabub HOSSAIN  International Conference on Applied Mechanics and Mechatronics Engineering (AMME) 2015, pp.1-5
Journal 2014 Bottom‐inlet‐type micro‐electro‐mechanical system acoustic sensors based on two polyimide/amorphous‐Si sacrificial layers   Jaewoo Lee  IET Micro & Nano Letters, v.9, no.12, pp.845-849 1 원문
Journal 2014 The Control of Oscillation Mode in Silicon Microbeams Using Silicon Nitride Anchor   Baek In Bok  Applied Physics Letters, v.105, no.10, pp.1-5 2 원문
Journal 2014 자동차용 차세대 센서 디바이스 동향   Kim Wonjong  주간기술동향, v.1634, pp.11-20
Journal 2013 Design and Fabrication of Vibration Based Energy Harvester Using Microelectromechanical System Piezoelectric Cantilever for Low Power Applications   Moonkeun Kim  Journal of Nanoscience and Nanotechnology, v.13, no.12, pp.7932-7937 15 원문
Journal 2013 Low Power Consumption Micro C2H5OH Gas Sensor Based on Micro-Heater and Screen Printing Technique   Moon Seungeon  Sensors and Actuators B : Chemical, v.187, pp.598-603 25 원문
Journal 2013 ROIC Technology Trends for Sensors   Roh Tae Moon  전자통신동향분석, v.28, no.5, pp.83-92 원문
Journal 2013 Semiconductor-Type MEMS Gas Sensor for Real-Time Environmental Monitoring Applications   Moon Seungeon  ETRI Journal, v.35, no.4, pp.617-624 54 원문
Conference 2013 A Bottom-Inlet type MEMS Acoustic Sensor with Wheel-Shaped Back-Plate Anchor   Jaewoo Lee  EUROCON 2013, pp.2116-2122 0 원문
Journal 2012 EBCO - Efficient Boundary Detection and Tracking Continuous Objects in WSNs   Sajjad Hussain Chauhdary  KSII Transactions on Internet and Information Systems, v.6, no.11, pp.2901-2919 7
Journal 2012 High-Response and Low-Power-Consumption CO Micro Gas Sensor Based on Nano-Powders and a Micro-Heater   Moon Seungeon  Journal of the Korean Physical Society, v.60, no.2, pp.235-239 5 원문
Journal 2012 Fabrication of a HCHO gas sensor based on a MEMS heater and inkjet printing   Lee Hyung-Kun  Journal of the Korean Physical Society, v.60, no.2, pp.225-229 10 원문
Conference 2011 A Surface-Micromachined MEMS Acoustic Sensor with Back-Plate Anchors of 100 μm Depth   Jaewoo Lee  SENSORS 2011, pp.1-4 6 원문
Conference 2010 A surface-micromachined MEMS acoustic sensor with 0.8   Jaewoo Lee  SENSORS 2010, pp.1779-1782 4 원문
Journal 2010 Low Power Consumption and High Sensitive NO2 Micro Gas Sensor based on Co-planar Micro-heater fabricated by using CMOS-MEMS Process   Moon Seungeon  Journal of the Korean Physical Society, v.56, no.1, pp.434-438 12 원문
Conference 2009 A Surface-Micromachined MEMS Acoustic Sensor with X-Shape Bottom Electrode Anchor   Jaewoo Lee  SENSORS 2009, pp.1313-1316 12 원문
Journal 2009 A Piezoelectric Microspeaker with a High-Quality PMN-PT Single-Crystal Membrane   Hye Jin Kim  Journal of the Korean Physical Society, v.54, no.2, pp.1-4
Conference 2008 Surface-Micromachined Deep Back Chamber MEMS Acoustic Sensor Using Two Sacrificial Layers   Jaewoo Lee  SENSORS 2008, pp.569-572 5 원문
Journal 2008 Micro-Electro-Mechanical-Systems-Based Infrared Spectrometer Composed of Multi-Slit Grating and Bolometer Array   양재창  Japanese Journal of Applied Physics, v.47, no.8, pp.6943-6948 17 원문
Journal 2008 The Fabrication of Bolometric IR Detector for Glucose Concentration Detection   최주찬  센서학회지, v.17, no.4, pp.250-255 원문
Conference 2007 A Bidirectional Readout Integrated Circuit (ROIC) with Capacitance-to-Time Conversion Operation for High Performance Capacitive MEMS Accelerometers   Sungsik Lee  SENSORS 2007, pp.288-291 7 원문
Journal 2007 Sublithographic Vertical Gold Nanogap for Label-free Electrical Detection of Protein-ligand Binding   장동윤  Journal of Vacuum Science and Technology B, v.25, no.2, pp.443-447 62 원문
Conference 2006 Self-Operated Blood Plasma Separation using Micropump in Polymer-based Microfluidic Device   Jang Won Ick  Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III (SPIE 6415), v.6415, pp.1-8 4 원문
Journal 2006 Micromachined Air-Gap Structure MEMS Acoustic Sensor using Reproducible High-Speed Lateral Etching and CMP Process   Sang Choon Ko  Journal of Micromechanics and Microengineering, v.16, no.10, pp.2071-2076 15 원문
Journal 2006 Robust Positioning Technique in Low-Cost DR/GPS for Land Navigation   Cho Seong Yun  IEEE Transactions on Instrumentation and Measurement, v.55, no.4, pp.1132-1142 98 원문
Journal 2006 Comparative study on Chemical Stability of Dielectric Oxide Films under HF Wet and Vapor Etching for Radiofrequency Microelectromechanical System Application   Yang Woo Seok  Thin Solid Films, v.500, no.1-2, pp.231-236 20 원문
Journal 2005 A low-loss single-pole six-throw switch based on compact RF MEMS switches   Jaewoo Lee  IEEE Transactions on Microwave Theory and Techniques, v.53, no.11, pp.3335-3344 51 원문
Conference 2005 A Single-Pole 6-Throw (SP6T) Antenna Switch Using Metal-Contact RF MEMS Switches for Multi-Band Applications   Jaewoo Lee  IEEE MTT-S International Microwave Symposium 2005, pp.931-934 8 원문
Journal 2005 Floating-patch MEMS Antennas on HRS Substrate for Millimetre-wave Applications   조용희  Electronics Letters, v.41, no.1, pp.5-6 0 원문
Conference 2004 Design and performance of a self-sensing, self-actuating piezoelectric monomorph with interdigitated electrodes   Yong K. Hong  Optomechatronic Sensors, Actuators, and Control (SPIE 5602), pp.210-217 10 원문
Conference 2004 Novel lithography process for extreme deep trench by using laminated negative dry film resist   Jung Moon Youn  International Conference on Micro Electro Mechanical Systems (MEMS) 2004, pp.685-688 원문
특허 검색결과
Status Year Patent Name Country Family Pat. KIPRIS
Registered 2008 PIEZOELECTRIC MICROSPEAKER USING MICROELECTROMECHANICAL SYSTEMS AND METHOD OF MANUFACTURING THE SAME UNITED STATES
Registered 2012 MICROELECTROMECHANICAL SYSTEMS TYPE SEMICONDUCTOR GAS SENSOR USING MICROHEATER HAVING MANY HOLES AND METHOD FOR MANUFACTURING THE SAME UNITED STATES
Registered 2008 멤스 마이크로폰 및 그 제조 방법 KOREA KIPRIS
Registered 2009 MICRO-ELECTROMECHANICAL SYSTEMS (MEMS) MICROPHONE AND METHOD OF MANUFACTURING THE SAME UNITED STATES
Registered 2006 MICRO-ELECTRO MECHANICAL SYSTEMS SWITCH AND METHOD OF FABRICATING THE SAME UNITED STATES
Registered 2012 MICRO-ELECTROMECHANICAL SYSTEMS (MEMS) MICROPHONE AND METHOD OF MANUFACTURING THE SAME UNITED STATES
연구보고서 검색결과
Type Year Research Project Primary Investigator Download
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