학술지
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2022 |
Characteristics of PEALD-Hafnium Dioxide Films and their Application to Gate Insulator Stacks of Photosynaptic Transistors
김지은 Advanced Electronic Materials, v.8 no.4, pp.1-8 |
4 |
원문
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학술지
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2021 |
Organic/Inorganic Hybrid Thin-Film Encapsulation Using Inkjet Printing and PEALD for Industrial Large-Area Process Suitability and Flexible OLED Application
권병화 ACS Applied Materials & Interfaces, v.13 no.46, pp.54621-55766 |
19 |
원문
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학술지
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2021 |
Optimizing Oxide Mixing Ratio for Achieving Energy-Efficient Oxide Thin-Film Transistors
문제현 Physica Status Solidi (A) - Applications and Materials Science, v.218 no.16, pp.1-5 |
1 |
원문
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학술지
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2021 |
Effects of Moisture-Proof Back Passivation Layers of Al2O3 and AlxTi1-xOy Films on Efficiency Improvement and Color Modulation in Transparent a-Si:H Solar Cells
김지은 ACS Applied Materials & Interfaces, v.13 no.4, pp.4968-4974 |
10 |
원문
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학술지
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2019 |
All-oxide Thin-film Transistors with Channels of Mixed InOx-ZnOy Formed by Plasma-enhanced Atomic Layer Deposition Process
이정무 Journal of Vacuum Science and Technology A, v.37 no.6, pp.1-7 |
7 |
원문
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학술지
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2018 |
Enhanced Carrier Transport Properties in GaN-Based Metal-Insulator-Semiconductor High Electron Mobility Transistor with SiN/Al2O3 Bi-Layer Passivation
장성재 ECS Journal of Solid State Science and Technology, v.7 no.6, pp.86-90 |
7 |
원문
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학술지
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2016 |
Improved Stability of Electrical Properties of Nitrogen-added Al2O3 Films Grown by PEALD as Gate Dielectric
이다정 Materials Research Bulletin, v.83, pp.597-602 |
10 |
원문
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학술지
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2016 |
Multi-Layered Hydrogenated P-Type Microcrystalline Silicon Windows for a-Si:H Thin Film Solar Cells on Opaque Substrates
이유정 International Journal of Hydrogen Energy, v.41 no.15, pp.6240-6246 |
4 |
원문
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학술지
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2016 |
TiN/PECVD-Si3N4/TiN Diaphragm-based Capacitive-type MEMS Acoustic Sensor
이재우 Electronics Letters, v.52 no.6, pp.468-470 |
5 |
원문
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학술대회
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2015 |
The Effect of Annealing Treatment on Indium Oxide/Zinc Oxide Heterostructured Thin Films Transistors Grown by Plasma Enhanced Atomic Layer Deposition
이환재 International Conference on Advanced Materials and Devices (ICAMD) 2015, pp.1-1 |
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학술대회
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2015 |
A Study on the Physical and Electrical Properties of Indium Oxide/Zinc Oxide Heterostructured Thin Films Deposited by Plasma Enhanced Atomic Layer Deposition
이정무 International Conference on Advanced Materials and Devices (ICAMD) 2015, pp.1-1 |
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학술대회
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2015 |
The Effect of Post-Annealing on Bias Stability of InOx/ZnO Superlattice Thin Film Transistors Grown by Plasma Enhanced Atomic Layer Deposition
이환재 Asian-European International Conference on Plasma Surface Engineering (AEPSE) 2015, pp.1-1 |
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학술대회
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2015 |
Growth Characteristics and Electrical Properties of Indium Oxide and Zinc Oxide Superlattice Thin Films by Plasma Enhanced Atomic Layer Deposition
이정무 Asian-European International Conference on Plasma Surface Engineering (AEPSE) 2015, pp.1-1 |
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학술대회
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2015 |
Characterization and Optimization of Plasma-Enhanced Chemical Vapor Deposited SiO2 Film as a Hydrogen Diffusion Barrier in Metal Oxide Thin-Film Transistors
조성행 International Meeting on Information Display (IMID) 2015, pp.332-332 |
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학술지
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2013 |
Fabrication of Enhancement-Mode AlGaN/GaN High Electron Mobility Transistors Using Double Plasma Treatment
임종원 Thin Solid Films, v.547, pp.106-110 |
9 |
원문
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학술지
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2013 |
Phase Transition of Hydrogenated SiGe Thin Films in Plasma-Enhanced Chemical Vapor Deposition
윤선진 Thin Solid Films, v.546, pp.362-366 |
3 |
원문
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학술지
|
2013 |
Transparent Non-Volatile Memory Device Using Silicon Quantum Dots
박래만 Electronic Materials Letters, v.9 no.4, pp.467-469 |
6 |
원문
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학술지
|
2013 |
Effect of Hydrogen Plasma Treatment on Nano-Structured TiO2 Films for the Enhanced Performance of Dye-Sensitized Solar Cell
김형진 Applied Surface Science, v.274, pp.171-175 |
42 |
원문
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학술대회
|
2012 |
Crystallization of Hydrogenated SiGe Thin Films Deposited by Plasma-Enhanced Chemical Vapor Deposition
IUMRS International Conference in Asia (IUMRS-ICA) 2012, pp.1-1 |
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학술지
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2011 |
Conformal Deposition of an Insulator Layer and Ag Nano Paste Filling of a through Silicon Via for a 3D Interconnection
백규하 Journal of the Korean Physical Society, v.59 no.3, pp.2252-2258 |
8 |
원문
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학술지
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2011 |
Comparative Study of Silicon Quantum Dot Formation In-situ Grown with a Gas Mixture of SiH4+N2 and SiH4+NH3
김태엽 Journal of the Korean Physical Society, v.59 no.2, pp.308-311 |
2 |
원문
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학술지
|
2011 |
Effect of Deposition Conditions and Crystallinity of Substrate on Phase Transition of Hydrogenated Si Films
김준관 Journal of the Electrochemical Society, v.158 no.7, pp.D430-D434 |
7 |
원문
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학술지
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2010 |
Fabrication of a Nanosize Pattern Embedded Plastic Chip via an Injection Molding Method for Application to an Optical Biosensor
김경현 International Polymer Processing, v.25 no.5, pp.341-345 |
2 |
원문
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학술지
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2010 |
Fabrication of Self-Aligned TFTs with a Ultra-Low Temperature Polycrystalline Silicon Process on Metal Foils
문제현 Solid-State Electronics, v.54 no.11, pp.1326-1331 |
2 |
원문
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학술대회
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2010 |
The Thickness Effect of SiOx Layer in CIGS Thin-Film Solar Cells Fabricated on Stainless-Steel Substrate
정용덕 Photovoltaic Specialists Conference (PVSC) 2010, pp.3401-3402 |
3 |
원문
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학술지
|
2010 |
Bipolar Resistive Switching in Amorphous Titanium Oxide Thin Film
정후영 Physica Status Solidi (RRL), v.4 no.1-2, pp.28-30 |
59 |
원문
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학술지
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2010 |
A Low-Temperature-Grown TiO2-Based Device for the Flexible Stacked RRAM Application
정후영 Nanotechnology, v.21 no.11, pp.1-6 |
128 |
원문
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학술지
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2010 |
Optical and Electrical Properties of AlxTi1-xO Films
임정욱 Journal of the Korean Physical Society, v.56 no.1, pp.96-99 |
3 |
원문
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학술지
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2010 |
Bipolar Resistive Switching in Amorphous Titanium Oxide Thin Film
정후영 Physica Status Solidi (RRL), v.4 no.1-2, pp.1-3 |
59 |
원문
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학술지
|
2009 |
Evaluation of 1/f Noise Characteristics for Si-Based Infrared Detection Materials
류호준 ETRI Journal, v.31 no.6, pp.703-708 |
3 |
원문
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학술지
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2008 |
Quantum-dot Light-emitting Diodes Utilizing CdSe/ZnS Nanocrystals Embedded in TiO2TiO2 Thin Film
강승희 Applied Physics Letters, v.93 no.19, pp.1-3 |
30 |
원문
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학술대회
|
2008 |
Sputtered Silicon Antimony Thin Film for The Infrared Detection Layer of Microbolometer
류호준 SENSORS 2008, pp.301-304 |
0 |
원문
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학술지
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2008 |
Optical AlxTi1-xOy Films Grown by Plasma Enhanced Atomic Layer Deposition
임정욱 Japanese Journal of Applied Physics, v.47 no.8, pp.6934-6937 |
9 |
원문
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학술지
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2008 |
Vanadium Dioxide Films Deposited on Amorphous SiO2- and Al2O3-Coated Si Substrates by Reactive RF-Magnetron Sputter Deposition
윤선진 Japanese Journal of Applied Physics, v.47 no.4, pp.3067-3069 |
22 |
원문
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학술지
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2007 |
Characteristics of Nanocomposite ZrO2/Al2O3 Films Deposited by Plasma-Enhanced Atomic Layer Deposition
윤선진 Journal of Nanoscience and Nanotechnology, v.7 no.11, pp.4180-4184 |
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학술지
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2007 |
Characteristics of AlxTi1_xOy Films Grown by Plasma-Enhanced Atomic Layer Deposition
임정욱 Journal of the Electrochemical Society, v.154 no.11, pp.G239-G243 |
24 |
원문
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학술지
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2007 |
Novel Organic Inverters with Dual-Gate Pentacene Thin-Film Transistor
구재본 Organic Electronics, v.8 no.5, pp.552-558 |
54 |
원문
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학술지
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2007 |
Characteristics of Pentacene Thin Film Transistor with Al2O3 Gate Dielectrics on Plastic Substrate
임정욱 Electrochemical and Solid-State Letters, v.10 no.10, pp.J36-J38 |
8 |
원문
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학술지
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2007 |
Stress Reduction of Ge2Sb2Te5 Crystallization by Capping Al2O3 Film Grown by PEALD
박영삼 ECS Transactions, v.11 no.7, pp.245-248 |
2 |
원문
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학술대회
|
2007 |
Improvement of Stability in ZnO TFT Under Bias Stress
황치선 Society for Information Display (SID) International Symposium 2007, pp.237-240 |
6 |
원문
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학술지
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2007 |
Pentacene-Thin Film Transistors with ZrO2 Gate Dielectric Layers Deposited by Plasma-Enhanced Atomic Layer Deposition
윤선진 Electrochemical and Solid-State Letters, v.10 no.3, pp.H90-H93 |
11 |
원문
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학술지
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2007 |
Hysteresis and Threshold Voltage Shift of Pentacene Thin-film Transistors and Inverters with Al2O3 Gate Dielectric
구재본 Applied Physics Letters, v.90 no.13, pp.1-3 |
56 |
원문
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학술지
|
2007 |
Pentacene Thin-film Transistors and Inverters with Plasma-enhanced Atomic-layer-deposited Al2O3 Gate Dielectric
구재본 Thin Solid Films, v.515 no.5, pp.3132-3137 |
26 |
원문
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학술지
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2006 |
Threshold Voltage Control of Pentacene Thin-Film Transistor with Dual-Gate Structure
구재본 Journal of Information Display, v.7 no.3, pp.27-30 |
6 |
원문
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학술지
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2006 |
Low-Voltage and High-Gain Pentacene Inverters with Plasma-Enhanced Atomic-Layer-Deposited Gate Dielectrics
구재본 Applied Physics Letters, v.89 no.3, pp.1-3 |
21 |
원문
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학술대회
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2006 |
High-K Nano-Composite ZrO2/Al2O3 Films Deposited by Plasma-Enhanced Atomic Layer Deposition
윤선진 International Conference on Nano Science and Nano Technology (GJ-NST) 2009, pp.1-25 |
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학술지
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2006 |
Performance Improvement of Ultralow Temperature Polycrystalline Silicon TFT on Plastic Substrate by Plasma Oxidation of Polycrystalline Si Surface
김용해 IEEE Electron Device Letters, v.27 no.11, pp.896-898 |
10 |
원문
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학술지
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2006 |
High Negative Differential Resistance in Silicon Quantum Dot Metal-Insulator-Semiconductor Structure
박래만 Applied Physics Letters, v.89 no.15, pp.1-3 |
14 |
원문
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학술대회
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2006 |
Characteristics of ZrAlO Films Deposited by Plasma Enhanced Atomic Layer Deposition
윤선진 The Electrochemical Society (ECS) Meeting 2006, pp.1-2 |
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학술지
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2006 |
Pentacene Thin-Film Transistors and Inverters with Dual-Gate Structure
구재본 Electrochemical and Solid-State Letters, v.9 no.11, pp.G320-G322 |
9 |
원문
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학술대회
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2006 |
Transparent ZnO Transistor Array by Means of Plasma Enhanced Atomic Layer Deposition
박상희 International Meeting on Information Display 2006, pp.601-604 |
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학술대회
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2006 |
Plasma-Enhanced Atomic Layer Deposition of ZrO2 film and the Performance of Pentacene thin film Transistor with ZrO2 Gate Dielectric Layer
윤선진 International Conference on Atomic Layer Deposition Workshop (ALD) 2006, pp.1-1 |
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학술대회
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2006 |
Plasma Enhanced Atomic Layer Deposition of Vanadium Oxide using Tetrakis(Ethylmethylamino) Vanadium and O2 as Precursors
윤선진 International Conference on Atomic Layer Deposition Workshop (ALD) 2006, pp.1-1 |
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학술대회
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2006 |
Switching Mechanism of TiO2 thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition
유민기 MRS Meeting 2006 (Spring), pp.1-1 |
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학술대회
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2006 |
Low-Voltage Pentacene Transistors and Inverters with Plasma-Enhanced Atomic Layer Deposited Gate Dielectrics
구재본 MRS Meeting 2006 (Spring), pp.1-14 |
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학술지
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2006 |
Comparative Study of DC and Microwave Characteristics of 0.12 μm Double-Recessed Gate AlGaAs/InGaAs/GaAs Pseudomorphic High-Electron-Mobility Transistors Using Dielectric-Assisted Process
임종원 Japanese Journal of Applied Physics, v.45 no.4B, pp.3358-3363 |
0 |
원문
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학술지
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2006 |
Comparative study on Chemical Stability of Dielectric Oxide Films under HF Wet and Vapor Etching for Radiofrequency Microelectromechanical System Application
양우석 Thin Solid Films, v.500 no.1-2, pp.231-236 |
18 |
원문
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학술대회
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2006 |
Plasma-Enhanced Atomic Layer Deposition 기술을 이용한 ZrOB 2B 박막 증착 공정에서 증착 온도와 Plasma Pulse Width가 박막 특성에 미치는 효과
윤선진 한국반도체 학술 대회 (KCS) 2006, pp.1-2 |
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학술지
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2006 |
Electrical Properties of Aluminum Silicate Films Grown by Plasma Enhanced Atomic Layer Deposition
임정욱 Electrochemical and Solid-State Letters, v.9 no.1, pp.F8-F11 |
9 |
원문
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학술지
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2005 |
Effect of Plasma on Characteristics of Zirconium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition
윤선진 Electrochemical and Solid-State Letters, v.8 no.11, pp.F47-F50 |
27 |
원문
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학술대회
|
2005 |
Characteristics of ZNO thin Films by Means of Plasma Atomic Layer Deposition
박상희 ECS Transactions, pp.125-130 |
1 |
원문
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학술지
|
2005 |
Characteristics of Aluminum Silicate Films Grown by Plasma-Enhanced Atomic Layer Deposition
임정욱 Electrochemical and Solid-State Letters, v.8 no.9, pp.F25-F28 |
15 |
원문
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학술지
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2005 |
Nanofabrication of InGaAsP periodic 2D columns with square and hexagonal lattices by reactive ion etching
이지면 Thin Solid Films, v.475 no.1-2, pp.189-193 |
8 |
원문
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학술지
|
2005 |
Ultrathin Film Encapsulation of an OLED by ALD
박상희 Electrochemical and Solid-State Letters, v.8 no.2, pp.21-23 |
143 |
원문
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학술지
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2005 |
Low-Temperature Growth of SiO2 Films by Plasma-Enhanced Atomic Layer Deposition
임정욱 ETRI Journal, v.27 no.1, pp.118-121 |
68 |
원문
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학술지
|
2004 |
Surface micromachined thermally driven micropump
장원익 Sensors and Actuators A : Physical, v.115 no.1, pp.151-158 |
20 |
원문
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학술지
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2004 |
High-Performance Ultralow-Temperature Polycrystalline Silicon TFT Using Sequential Lateral Solidification
김용해 IEEE Electron Device Letters, v.25 no.8, pp.550-552 |
27 |
원문
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학술지
|
1998 |
High-Quality Conformal Silicon Oxide Films Prepared by Multi-Step Sputtering PECVD and Chemical Mechanical Polishing
박민 Journal of Electronic Materials, v.27 no.11, pp.1262-1267 |
9 |
원문
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