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Subjects : Plasma-enhanced

  • Articles (77)
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Type Year Title Cited Download
Journal 2025 In vitro recording and stimulation performance of multi-electrode arrays passivated with plasma-enhanced atomic layer-deposited metal oxides   Kim Yong Hee  Nanoscale, v.17, no.14, pp.8731-8740 1 원문
Journal 2022 Characteristics of PEALD–Hafnium Dioxide Films and their Application to Gate Insulator Stacks of Photosynaptic Transistors   Kim Jieun  Advanced Electronic Materials, v.8, no.4, pp.1-8 7 원문
Journal 2021 Organic/Inorganic Hybrid Thin-Film Encapsulation Using Inkjet Printing and PEALD for Industrial Large-Area Process Suitability and Flexible OLED Application   Kwon Byoung-Hwa  ACS Applied Materials & Interfaces, v.13, no.46, pp.54621-55766 48 원문
Journal 2021 Optimizing Oxide Mixing Ratio for Achieving Energy‐Efficient Oxide Thin‐Film Transistors   Jaehyun Moon  Physica Status Solidi (A) - Applications and Materials Science, v.218, no.16, pp.1-5 1 원문
Journal 2021 Effects of Moisture-Proof Back Passivation Layers of Al2O3 and AlxTi1-xOy Films on Efficiency Improvement and Color Modulation in Transparent a-Si:H Solar Cells   Kim Jieun  ACS Applied Materials & Interfaces, v.13, no.4, pp.4968-4974 13 원문
Journal 2019 All-oxide Thin-film Transistors with Channels of Mixed InOx-ZnOy Formed by Plasma-enhanced Atomic Layer Deposition Process   Lee Jeongmu  Journal of Vacuum Science and Technology A, v.37, no.6, pp.1-7 12 원문
Journal 2018 Enhanced Carrier Transport Properties in GaN-Based Metal-Insulator-Semiconductor High Electron Mobility Transistor with SiN/Al2O3 Bi-Layer Passivation   Sungjae Chang  ECS Journal of Solid State Science and Technology, v.7, no.6, pp.86-90 9 원문
Conference 2017 Color Controllability and Improved Performance of a-Si:H Transparent Solar Cells by Regulating the Conditions of Al2O3 Passivation Films   Lim Jungwook  European Photovoltaic Solar Energy Conference and Exhibition (EU PVSEC) 2017, pp.1-4
Journal 2016 Improved stability of electrical properties of nitrogen-added Al 2 O 3 films grown by PEALD as gate dielectric   Lee Da Jung  Materials Research Bulletin, v.83, pp.597-602 12 원문
Conference 2016 Oxide Vertical TFTs for the Application to the Ultra High Resolution Display   염혜인  Society for Information Display (SID) International Symposium 2016, pp.820-822 36 원문
Journal 2016 Multi-Layered Hydrogenated P-Type Microcrystalline Silicon Windows for a-Si:H Thin Film Solar Cells on Opaque Substrates   Lee Yoo Jeong  International Journal of Hydrogen Energy, v.41, no.15, pp.6240-6246 4 원문
Journal 2016 TiN/PECVD-Si3N4/TiN Diaphragm-based Capacitive-type MEMS Acoustic Sensor   Jaewoo Lee  Electronics Letters, v.52, no.6, pp.468-470 6 원문
Conference 2015 The Effect of Annealing Treatment on Indium Oxide/Zinc Oxide Heterostructured Thin Films Transistors Grown by Plasma Enhanced Atomic Layer Deposition   Lee Hwanjae  International Conference on Advanced Materials and Devices (ICAMD) 2015, pp.1-1
Conference 2015 A Study on the Physical and Electrical Properties of Indium Oxide/Zinc Oxide Heterostructured Thin Films Deposited by Plasma Enhanced Atomic Layer Deposition   Lee Jeongmu  International Conference on Advanced Materials and Devices (ICAMD) 2015, pp.1-1
Conference 2015 The Effect of Post-Annealing on Bias Stability of InOx/ZnO Superlattice Thin Film Transistors Grown by Plasma Enhanced Atomic Layer Deposition   Lee Hwanjae  Asian-European International Conference on Plasma Surface Engineering (AEPSE) 2015, pp.1-1
Conference 2015 Growth Characteristics and Electrical Properties of Indium Oxide and Zinc Oxide Superlattice Thin Films by Plasma Enhanced Atomic Layer Deposition   Lee Jeongmu  Asian-European International Conference on Plasma Surface Engineering (AEPSE) 2015, pp.1-1
Conference 2015 Characterization and Optimization of Plasma-Enhanced Chemical Vapor Deposited SiO2 Film as a Hydrogen Diffusion Barrier in Metal Oxide Thin-Film Transistors   Cho Sung Haeng  International Meeting on Information Display (IMID) 2015, pp.332-332
Conference 2015 The Highly Stable InGaZnO TFTs Deposited by High Density Plasma Sputtering   Cho Sung Haeng  International Thin-Film Transistor Conference (ITC) 2015, pp.17-18
Journal 2013 Fabrication of Enhancement-Mode AlGaN/GaN High Electron Mobility Transistors Using Double Plasma Treatment   Jong-Won Lim  Thin Solid Films, v.547, pp.106-110 10 원문
Journal 2013 Phase Transition of Hydrogenated SiGe Thin Films in Plasma-Enhanced Chemical Vapor Deposition   Sun Jin Yun  Thin Solid Films, v.546, pp.362-366 3 원문
Journal 2013 Transparent Non-Volatile Memory Device Using Silicon Quantum Dots   Rae-Man Park  Electronic Materials Letters, v.9, no.4, pp.467-469 6 원문
Journal 2013 Effect of Hydrogen Plasma Treatment on Nano-Structured TiO2 Films for the Enhanced Performance of Dye-Sensitized Solar Cell   김형진  Applied Surface Science, v.274, pp.171-175 43 원문
Conference 2012 Crystallization of Hydrogenated SiGe Thin Films Deposited by Plasma-Enhanced Chemical Vapor Deposition     IUMRS International Conference in Asia (IUMRS-ICA) 2012, pp.1-1
Journal 2011 Conformal Deposition of an Insulator Layer and Ag Nano Paste Filling of a through Silicon Via for a 3D Interconnection   Baek Kyu-Ha  Journal of the Korean Physical Society, v.59, no.3, pp.2252-2258 10 원문
Journal 2011 Comparative Study of Silicon Quantum Dot Formation In-situ Grown with a Gas Mixture of SiH4+N2 and SiH4+NH3   Tae-Youb Kim  Journal of the Korean Physical Society, v.59, no.2, pp.308-311 2 원문
Journal 2011 Effect of Deposition Conditions and Crystallinity of Substrate on Phase Transition of Hydrogenated Si Films   김준관  Journal of the Electrochemical Society, v.158, no.7, pp.D430-D434 7 원문
Journal 2010 Fabrication of a Nanosize Pattern Embedded Plastic Chip via an Injection Molding Method for Application to an Optical Biosensor   Kim Kyung Hyun  International Polymer Processing, v.25, no.5, pp.341-345 2 원문
Journal 2010 Fabrication of Self-Aligned TFTs with a Ultra-Low Temperature Polycrystalline Silicon Process on Metal Foils   Jaehyun Moon  Solid-State Electronics, v.54, no.11, pp.1326-1331 2 원문
Conference 2010 The Thickness Effect of SiOx Layer in CIGS Thin-Film Solar Cells Fabricated on Stainless-Steel Substrate   Chung Yong-Duck  Photovoltaic Specialists Conference (PVSC) 2010, pp.3401-3402 3 원문
Journal 2010 A Low-Temperature-Grown TiO2-Based Device for the Flexible Stacked RRAM Application   Hu Young Jeong  Nanotechnology, v.21, no.11, pp.1-6 134 원문
Journal 2010 Optical and Electrical Properties of AlxTi1-xO Films   Lim Jungwook  Journal of the Korean Physical Society, v.56, no.1, pp.96-99 3 원문
Journal 2010 Bipolar Resistive Switching in Amorphous Titanium Oxide Thin Film   Hu Young Jeong  Physica Status Solidi (RRL), v.4, no.1-2, pp.1-3 60 원문
Journal 2009 Evaluation of 1/f Noise Characteristics for Si-Based Infrared Detection Materials   Ryu Hojun  ETRI Journal, v.31, no.6, pp.703-708 3 원문
Conference 2009 Electrical and Optical Properties of AlTiO Films   Lim Jungwook  한국반도체 학술 대회 (KCS) 2009, pp.1-2
Journal 2008 Quantum-dot light-emitting diodes utilizing CdSe∕ZnS nanocrystals embedded in TiO2 thin film   강승희  Applied Physics Letters, v.93, no.19, pp.1-3 30 원문
Conference 2008 Sputtered Silicon Antimony Thin Film for The Infrared Detection Layer of Microbolometer   Ryu Hojun  SENSORS 2008, pp.301-304 0 원문
Conference 2008 1/f Noise Characteristics of Sputtered Silicon Antimony Thin Film for Microbolometer   Ryu Hojun  Eurosensors 2008, pp.877-880
Journal 2008 Optical AlxTi1-xOy Films Grown by Plasma Enhanced Atomic Layer Deposition   Lim Jungwook  Japanese Journal of Applied Physics, v.47, no.8, pp.6934-6937 10 원문
Journal 2008 Vanadium Dioxide Films Deposited on Amorphous SiO2- and Al2O3-Coated Si Substrates by Reactive RF-Magnetron Sputter Deposition   Sun Jin Yun  Japanese Journal of Applied Physics, v.47, no.4, pp.3067-3069 22 원문
Journal 2007 Characteristics of Al[sub x]Ti[sub 1−x]O[sub y] Films Grown by Plasma-Enhanced Atomic Layer Deposition   Lim Jungwook  Journal of the Electrochemical Society, v.154, no.11, pp.G239-G243 26 원문
Journal 2007 PEALD 방법으로 증착한 ZrO2/Al2O3 nano-compoiste 박막의 특성   Sun Jin Yun  Journal of Nanoscience and Nanotechnology, v.7, no.11, pp.4180-4184
Journal 2007 Novel Organic Inverters with Dual-Gate Pentacene Thin-Film Transistor   Koo Jae Bon  Organic Electronics, v.8, no.5, pp.552-558 61 원문
Journal 2007 Characteristics of Pentacene Thin Film Transistor with Al2O3 Gate Dielectrics on Plastic Substrate   Lim Jungwook  Electrochemical and Solid-State Letters, v.10, no.10, pp.J36-J38 8 원문
Journal 2007 Stress Reduction of Ge2Sb2Te5 Crystallization by Capping Al2O3 Film Grown by PEALD   Park Young Sam  ECS Transactions, v.11, no.7, pp.245-248 2 원문
Conference 2007 P‐18: Improvement of Stability in ZnO TFT Under Bias Stress   Hwang Chi-Sun  Society for Information Display (SID) International Symposium 2007, pp.237-240 6 원문
Journal 2007 Pentacene-Thin Film Transistors with ZrO2 Gate Dielectric Layers Deposited by Plasma-Enhanced Atomic Layer Deposition   Sun Jin Yun  Electrochemical and Solid-State Letters, v.10, no.3, pp.H90-H93 11 원문
Journal 2007 Hysteresis and Threshold Voltage Shift of Pentacene Thin-film Transistors and Inverters with Al2O3 Gate Dielectric   Koo Jae Bon  Applied Physics Letters, v.90, no.13, pp.1-3 58 원문
Journal 2007 Pentacene Thin-film Transistors and Inverters with Plasma-enhanced Atomic-layer-deposited Al2O3 Gate Dielectric   Koo Jae Bon  Thin Solid Films, v.515, no.5, pp.3132-3137 26 원문
Journal 2006 Fabrication and Characteristics of 0.12 μm Single and Double-Recessed Gate AlGaAs/InGaAs/GaAs PHEMTs Using a SiNx Pre-Passivation Layer   Jong-Won Lim  Journal of the Korean Physical Society, v.49, no.3, pp.S774-S779
Journal 2006 Threshold voltage control of pentacene thin‐film transistor with dual‐gate structure   Koo Jae Bon  Journal of Information Display, v.7, no.3, pp.27-30 7 원문
Conference 2006 High-K Nano-Composite ZrO2/Al2O3 Films Deposited by Plasma-Enhanced Atomic Layer Deposition   Sun Jin Yun  International Conference on Nano Science and Nano Technology (GJ-NST) 2009, pp.1-25
Journal 2006 Low-Voltage and High-Gain Pentacene Inverters with Plasma-Enhanced Atomic-Layer-Deposited Gate Dielectrics   Koo Jae Bon  Applied Physics Letters, v.89, no.3, pp.1-3 21 원문
Journal 2006 Performance Improvement of Ultralow Temperature Polycrystalline Silicon TFT on Plastic Substrate by Plasma Oxidation of Polycrystalline Si Surface   Kim Yong Hae  IEEE Electron Device Letters, v.27, no.11, pp.896-898 10 원문
Journal 2006 Pentacene Thin-Film Transistors and Inverters with Dual-Gate Structure   Koo Jae Bon  Electrochemical and Solid-State Letters, v.9, no.11, pp.G320-G322 9 원문
Conference 2006 Characteristics of ZrAlO Films Deposited by Plasma Enhanced Atomic Layer Deposition   Sun Jin Yun  The Electrochemical Society (ECS) Meeting 2006, pp.1-2
Journal 2006 High Negative Differential Resistance in Silicon Quantum Dot Metal-Insulator-Semiconductor Structure   Rae-Man Park  Applied Physics Letters, v.89, no.15, pp.1-3 14 원문
Conference 2006 Plasma Oxidation Effect on Ultralow Temperature Polycrystalline Silicon TFT on Plastic Substrate   Kim Yong Hae  International Meeting on Information Display 2006, pp.1122-1125
Conference 2006 Transparent ZnO Transistor Array by Means of Plasma Enhanced Atomic Layer Deposition   Park Sang-Hee  International Meeting on Information Display 2006, pp.601-604
Conference 2006 Plasma Enhanced Atomic Layer Deposition of Vanadium Oxide using Tetrakis(Ethylmethylamino) Vanadium and O2 as Precursors   Sun Jin Yun  International Conference on Atomic Layer Deposition Workshop (ALD) 2006, pp.1-1
Conference 2006 Plasma-Enhanced Atomic Layer Deposition of ZrO2 film and the Performance of Pentacene thin film Transistor with ZrO2 Gate Dielectric Layer   Sun Jin Yun  International Conference on Atomic Layer Deposition Workshop (ALD) 2006, pp.1-1
Conference 2006 Switching Mechanism of TiO2 thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition   Ryu Min Ki  MRS Meeting 2006 (Spring), pp.1-1
Conference 2006 Self-Aligned Thin Film Transistor Fabrication with an Ultra Low Temperature Polycrystalline Silicon Process on a Benzocyclobutene Planarized Stainless Steel Foil Substrate   Jaehyun Moon  Materials Research Society (MRS) Meeting 2006 (Spring), pp.1-6
Journal 2006 Comparative Study of DC and Microwave Characteristics of 0.12 µm Double-Recessed Gate AlGaAs/InGaAs/GaAs Pseudomorphic High-Electron-Mobility Transistors Using Dielectric-Assisted Process   Jong-Won Lim  Japanese Journal of Applied Physics, v.45, no.4B, pp.3358-3363 0 원문
Journal 2006 Comparative study on Chemical Stability of Dielectric Oxide Films under HF Wet and Vapor Etching for Radiofrequency Microelectromechanical System Application   Yang Woo Seok  Thin Solid Films, v.500, no.1-2, pp.231-236 20 원문
Conference 2006 Low-Voltage Pentacene Transistors and Inverters with Plasma-Enhanced Atomic Layer Deposited Gate Dielectrics   Koo Jae Bon  MRS Meeting 2006 (Spring), pp.1-14
Conference 2006 Plasma-Enhanced Atomic Layer Deposition 기술을 이용한 ZrOB 2B 박막 증착 공정에서 증착 온도와 Plasma Pulse Width가 박막 특성에 미치는 효과   Sun Jin Yun  한국반도체 학술 대회 (KCS) 2006, pp.1-2
Conference 2006 Fabrication and Characteristics of 0.12 μm Single and Double-Recessed Gate AlGaAs/InGaAs/GaAs PHEMTs Using a SiNx Pre-Passivation Layer   Jong-Won Lim  한국반도체 학술 대회 (KCS) 2006, pp.1-2
Journal 2006 Electrical Properties of Aluminum Silicate Films Grown by Plasma Enhanced Atomic Layer Deposition   Lim Jungwook  Electrochemical and Solid-State Letters, v.9, no.1, pp.F8-F11 9 원문
Journal 2005 Effect of Plasma on Characteristics of Zirconium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition   Sun Jin Yun  Electrochemical and Solid-State Letters, v.8, no.11, pp.F47-F50 27 원문
Conference 2005 Characteristics of ZnO Thin Films by Means of Plasma Enhanced Atomic Layer Deposition   Park Sang-Hee  ECS Transactions, pp.125-130 2 원문
Journal 2005 Characteristics of Aluminum Silicate Films Grown by Plasma-Enhanced Atomic Layer Deposition   Lim Jungwook  Electrochemical and Solid-State Letters, v.8, no.9, pp.F25-F28 16 원문
Journal 2005 Nanofabrication of InGaAsP periodic 2D columns with square and hexagonal lattices by reactive ion etching   이지면  Thin Solid Films, v.475, no.1-2, pp.189-193 8 원문
Journal 2005 원자층증착법에 의한 초박막 봉지기술   Park Sang-Hee  Electrochemical and Solid-State Letters, v.8, no.2, pp.21-23 153 원문
Journal 2005 Low-Temperature Growth of SiO2 Films by Plasma-Enhanced Atomic Layer Deposition   Lim Jungwook  ETRI Journal, v.27, no.1, pp.118-121 68 원문
Journal 2004 Surface micromachined thermally driven micropump   Jang Won Ick  Sensors and Actuators A : Physical, v.115, no.1, pp.151-158 21 원문
Journal 2004 고성능 저온 폴리실리콘 소자 특성   Kim Yong Hae  IEEE Electron Device Letters, v.25, no.8, pp.550-552 27 원문
Journal 1998 High-Quality Conformal Silicon Oxide Films Prepared by Multi-Step Sputtering PECVD and Chemical Mechanical Polishing   Min Park  Journal of Electronic Materials, v.27, no.11, pp.1262-1267 9 원문
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